TY - GEN
T1 - Design and implementation of an electromagnetically damped positioner with flexure suspension
AU - Huang, Kuan Lin
AU - Peng, Yuan Zhi
AU - Wu, Jim Wei
AU - Chen, Mei Yung
AU - Fu, Li Chen
PY - 2011
Y1 - 2011
N2 - In this paper, a novel design, control and implementation of a three degree-of-freedom (DOF) compact positioner is presented with high resolution in tens of nanometer-scale precision positioning and millimeter-level long travel range. According to the serial flexure mechanism design, whose motion comes from the elastic deformation of the flexure and the force allocation of five pairs of electromagnetic coils and permanent magnets, the precision positioner enables both horizontal and vertical actuations resulting in x-, y-, and z-motions respectively. Next, in order to improve the transient response and to suppress the vibration of the flexure suspension mechanism, an eddy current damper (ECD) is applied as a passive and noncontact resistance to vibration. Moreover, a laser interferometer sensing system is implemented to improve the positioning resolution of the stage. To maintain stability and robustness of the precision system, a decentralized adaptive sliding mode controller (DASMC) was implemented to overcome the overall situations of unmodeled system dynamics and external noises. From the experimental results, satisfactory performance has been observed, which means that the designated objectives of this research have been successfully attained, namely, (1)long working range, (2)high positioning resolution and (3)compact design.
AB - In this paper, a novel design, control and implementation of a three degree-of-freedom (DOF) compact positioner is presented with high resolution in tens of nanometer-scale precision positioning and millimeter-level long travel range. According to the serial flexure mechanism design, whose motion comes from the elastic deformation of the flexure and the force allocation of five pairs of electromagnetic coils and permanent magnets, the precision positioner enables both horizontal and vertical actuations resulting in x-, y-, and z-motions respectively. Next, in order to improve the transient response and to suppress the vibration of the flexure suspension mechanism, an eddy current damper (ECD) is applied as a passive and noncontact resistance to vibration. Moreover, a laser interferometer sensing system is implemented to improve the positioning resolution of the stage. To maintain stability and robustness of the precision system, a decentralized adaptive sliding mode controller (DASMC) was implemented to overcome the overall situations of unmodeled system dynamics and external noises. From the experimental results, satisfactory performance has been observed, which means that the designated objectives of this research have been successfully attained, namely, (1)long working range, (2)high positioning resolution and (3)compact design.
KW - Precision motion control
KW - compliant mechanism
KW - eddy current damper
KW - electromagnetiactuation
KW - passive vibration suppression
KW - serial flexure mechanism
UR - http://www.scopus.com/inward/record.url?scp=80155174956&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80155174956&partnerID=8YFLogxK
U2 - 10.1109/CCA.2011.6044458
DO - 10.1109/CCA.2011.6044458
M3 - Conference contribution
AN - SCOPUS:80155174956
SN - 9781457710629
T3 - Proceedings of the IEEE International Conference on Control Applications
SP - 1062
EP - 1067
BT - 2011 IEEE International Conference on Control Applications, CCA 2011
T2 - 2011 20th IEEE International Conference on Control Applications, CCA 2011
Y2 - 28 September 2011 through 30 September 2011
ER -