Design and implementation of an electromagnetically damped positioner with flexure suspension

Kuan Lin Huang, Yuan Zhi Peng, Jim Wei Wu, Mei Yung Chen, Li Chen Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

In this paper, a novel design, control and implementation of a three degree-of-freedom (DOF) compact positioner is presented with high resolution in tens of nanometer-scale precision positioning and millimeter-level long travel range. According to the serial flexure mechanism design, whose motion comes from the elastic deformation of the flexure and the force allocation of five pairs of electromagnetic coils and permanent magnets, the precision positioner enables both horizontal and vertical actuations resulting in x-, y-, and z-motions respectively. Next, in order to improve the transient response and to suppress the vibration of the flexure suspension mechanism, an eddy current damper (ECD) is applied as a passive and noncontact resistance to vibration. Moreover, a laser interferometer sensing system is implemented to improve the positioning resolution of the stage. To maintain stability and robustness of the precision system, a decentralized adaptive sliding mode controller (DASMC) was implemented to overcome the overall situations of unmodeled system dynamics and external noises. From the experimental results, satisfactory performance has been observed, which means that the designated objectives of this research have been successfully attained, namely, (1)long working range, (2)high positioning resolution and (3)compact design.

Original languageEnglish
Title of host publication2011 IEEE International Conference on Control Applications, CCA 2011
Pages1062-1067
Number of pages6
DOIs
Publication statusPublished - 2011 Nov 7
Event2011 20th IEEE International Conference on Control Applications, CCA 2011 - Denver, CO, United States
Duration: 2011 Sep 282011 Sep 30

Publication series

NameProceedings of the IEEE International Conference on Control Applications

Other

Other2011 20th IEEE International Conference on Control Applications, CCA 2011
CountryUnited States
CityDenver, CO
Period11/9/2811/9/30

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Keywords

  • Precision motion control
  • compliant mechanism
  • eddy current damper
  • electromagnetiactuation
  • passive vibration suppression
  • serial flexure mechanism

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Computer Science Applications
  • Mathematics(all)

Cite this

Huang, K. L., Peng, Y. Z., Wu, J. W., Chen, M. Y., & Fu, L. C. (2011). Design and implementation of an electromagnetically damped positioner with flexure suspension. In 2011 IEEE International Conference on Control Applications, CCA 2011 (pp. 1062-1067). [6044458] (Proceedings of the IEEE International Conference on Control Applications). https://doi.org/10.1109/CCA.2011.6044458