TY - GEN
T1 - Design and implementation of an atomic force microscope with adaptive sliding mode controller for large image scanning
AU - Peng, Yuan Zhi
AU - Wu, Jun Wei
AU - Huang, Kuan Chia
AU - Chen, Jyun Jhih
AU - Chen, Mei Yung
AU - Fu, Li Chen
PY - 2011
Y1 - 2011
N2 - Atomic force microscopy (AFM) is an advanced technique which aims to scan a sample through the use of a probe or a tip; however, conventional atomic force microscope system suffers from the limitation of small scanning range, due to the short travelling range of piezoelectric actuation. In this paper, we propose a large measurement- range AFM scanning system which combines both fine positioners of piezoelectric and electromagnetic actuations. While the piezoelectric positioner provides high speed scanning with nanometer resolution, the precision electromagnetic positioner is capable of 1 mm2 large field positioning with 30 nm rms error. The overall design of the stage consists of 4 pairs of electromagnetic actuator, monolithic serial flexure guidance with compression springs, an eddy current damper, and a commercial xyz piezoelectric positioner. Besides, a stationary compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is used to measure the amplitude of samples. Moreover, an adaptive sliding mode controller based on the analytical modeling is used to overcome the unmodeled system uncertainties and external disturbances. Finally, preliminary experiments are presented, demonstrating feasibility of the proposed system.
AB - Atomic force microscopy (AFM) is an advanced technique which aims to scan a sample through the use of a probe or a tip; however, conventional atomic force microscope system suffers from the limitation of small scanning range, due to the short travelling range of piezoelectric actuation. In this paper, we propose a large measurement- range AFM scanning system which combines both fine positioners of piezoelectric and electromagnetic actuations. While the piezoelectric positioner provides high speed scanning with nanometer resolution, the precision electromagnetic positioner is capable of 1 mm2 large field positioning with 30 nm rms error. The overall design of the stage consists of 4 pairs of electromagnetic actuator, monolithic serial flexure guidance with compression springs, an eddy current damper, and a commercial xyz piezoelectric positioner. Besides, a stationary compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is used to measure the amplitude of samples. Moreover, an adaptive sliding mode controller based on the analytical modeling is used to overcome the unmodeled system uncertainties and external disturbances. Finally, preliminary experiments are presented, demonstrating feasibility of the proposed system.
KW - CD/DVD PUH
KW - Precision motion control
KW - adaptive sliding mode control
KW - electromagnetic actuation
UR - http://www.scopus.com/inward/record.url?scp=84860668752&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84860668752&partnerID=8YFLogxK
U2 - 10.1109/CDC.2011.6161500
DO - 10.1109/CDC.2011.6161500
M3 - Conference contribution
AN - SCOPUS:84860668752
SN - 9781612848006
T3 - Proceedings of the IEEE Conference on Decision and Control
SP - 5577
EP - 5582
BT - 2011 50th IEEE Conference on Decision and Control and European Control Conference, CDC-ECC 2011
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2011 50th IEEE Conference on Decision and Control and European Control Conference, CDC-ECC 2011
Y2 - 12 December 2011 through 15 December 2011
ER -