Design and implementation of an atomic force microscope with adaptive sliding mode controller for large image scanning

Yuan Zhi Peng, Jun Wei Wu, Kuan Chia Huang, Jyun Jhih Chen, Mei-Yung Chen, Li Chen Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

Atomic force microscopy (AFM) is an advanced technique which aims to scan a sample through the use of a probe or a tip; however, conventional atomic force microscope system suffers from the limitation of small scanning range, due to the short travelling range of piezoelectric actuation. In this paper, we propose a large measurement- range AFM scanning system which combines both fine positioners of piezoelectric and electromagnetic actuations. While the piezoelectric positioner provides high speed scanning with nanometer resolution, the precision electromagnetic positioner is capable of 1 mm 2 large field positioning with 30 nm rms error. The overall design of the stage consists of 4 pairs of electromagnetic actuator, monolithic serial flexure guidance with compression springs, an eddy current damper, and a commercial xyz piezoelectric positioner. Besides, a stationary compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is used to measure the amplitude of samples. Moreover, an adaptive sliding mode controller based on the analytical modeling is used to overcome the unmodeled system uncertainties and external disturbances. Finally, preliminary experiments are presented, demonstrating feasibility of the proposed system.

Original languageEnglish
Title of host publication2011 50th IEEE Conference on Decision and Control and European Control Conference, CDC-ECC 2011
Pages5577-5582
Number of pages6
DOIs
Publication statusPublished - 2011 Dec 1
Event2011 50th IEEE Conference on Decision and Control and European Control Conference, CDC-ECC 2011 - Orlando, FL, United States
Duration: 2011 Dec 122011 Dec 15

Publication series

NameProceedings of the IEEE Conference on Decision and Control
ISSN (Print)0191-2216

Other

Other2011 50th IEEE Conference on Decision and Control and European Control Conference, CDC-ECC 2011
CountryUnited States
CityOrlando, FL
Period11/12/1211/12/15

Keywords

  • CD/DVD PUH
  • Precision motion control
  • adaptive sliding mode control
  • electromagnetic actuation

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Modelling and Simulation
  • Control and Optimization

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    Peng, Y. Z., Wu, J. W., Huang, K. C., Chen, J. J., Chen, M-Y., & Fu, L. C. (2011). Design and implementation of an atomic force microscope with adaptive sliding mode controller for large image scanning. In 2011 50th IEEE Conference on Decision and Control and European Control Conference, CDC-ECC 2011 (pp. 5577-5582). [6161500] (Proceedings of the IEEE Conference on Decision and Control). https://doi.org/10.1109/CDC.2011.6161500