Design and implementation of a new six-DOF Maglev positioner with a fluid bearing

Mei-Yung Chen, Sheng Chih Huang, Shao Kang Hung, Li Chen Fu

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

This paper proposes a new six degrees-of-freedom (6-DOF) electromagnetic precision positioner, made of a hybrid mechanism utilizing both a magnetic driving force and the uplifting force of the fluid, for which a new structure, the electromagnetic actuator, and an effective controller have been developed. The concept of the mechanism design involves not only the magnetic driving mechanism, but also the fluid buoyancy and damping properties, which help to counterbalance the weight of the platen so as to achieve a very low steady-state power consumption. The four goals of the new system design include the following: 1) to have a large range of motion (at the mm level); 2) to achieve precision positioning; 3) to design a compact but low-cost mechanism; and 4) to achieve low power consumption. In this system, there are a total of eight permanent magnets (PMs) attached to the movable carrier, and eight electromagnetic coils appropriately mounted on a fixed base. After exploring the characteristics of the magnetic forces between PMs and electromagnetic coils, the general 6-DOF dynamic model of this system is derived and analyzed. Then, because of the naturally unstable behavior and uncertainties of the underlying system, a robust adaptive sliding-mode controller is proposed to guarantee system stability for both regulation and tracking tasks. Finally, extensive experiments have been conducted to demonstrate the performance of the proposed system. The experimental results show that the range of motion is 3 mm × 3mm × 4 mm, and the tracking error in each axis is kept to within 10 μm, which reaches the limit of our optical sensors. These experimental results demonstrate satisfactory performance of the positioner in terms of theoretical analysis and experimental results.

Original languageEnglish
Article number5744122
Pages (from-to)449-458
Number of pages10
JournalIEEE/ASME Transactions on Mechatronics
Volume16
Issue number3
DOIs
Publication statusPublished - 2011 Jun 1

Fingerprint

Bearings (structural)
Permanent magnets
Electric power utilization
Controllers
Fluids
Optical sensors
Buoyancy
System stability
Dynamic models
Actuators
Damping
Systems analysis
Costs
Experiments

Keywords

  • Electromagnetic actuator
  • hybrid magnetic and fluid mechanism
  • positioner
  • robust adaptive sliding-mode controller

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Design and implementation of a new six-DOF Maglev positioner with a fluid bearing. / Chen, Mei-Yung; Huang, Sheng Chih; Hung, Shao Kang; Fu, Li Chen.

In: IEEE/ASME Transactions on Mechatronics, Vol. 16, No. 3, 5744122, 01.06.2011, p. 449-458.

Research output: Contribution to journalArticle

Chen, Mei-Yung ; Huang, Sheng Chih ; Hung, Shao Kang ; Fu, Li Chen. / Design and implementation of a new six-DOF Maglev positioner with a fluid bearing. In: IEEE/ASME Transactions on Mechatronics. 2011 ; Vol. 16, No. 3. pp. 449-458.
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