Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism

Mei Yung Chen*, Hsuan Han Huang, Shao Kang Hung, Li Chen Fu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)


In this paper, a novel, compact and three degree-of-freedoms (DOFs) micropositioner with large travel ranges is presented. The design of the micropositioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and uses the optical sensors to achieve the object of 3-DOF precise motion. An adaptive sliding-mode controller is proposed to let the system is more robust and stable in positioning. The developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allocation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demonstrated.

Original languageEnglish
Title of host publicationProceedings of the 2006 American Control Conference
Number of pages6
Publication statusPublished - 2006
Event2006 American Control Conference - Minneapolis, MN, United States
Duration: 2006 Jun 142006 Jun 16

Publication series

NameProceedings of the American Control Conference
ISSN (Print)0743-1619


Other2006 American Control Conference
Country/TerritoryUnited States
CityMinneapolis, MN


  • Adaptive sliding-mode controller
  • Micropositioner
  • Parallel flexure mechanism
  • Precision positioning

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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