Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism

Mei Yung Chen; Hsuan Han Huang; Shao Kang Hung; Li Chen Fu

Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism

Mei Yung Chen^*, Hsuan Han Huang, Shao Kang Hung, Li Chen Fu

^*Corresponding author for this work

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

In this paper, a novel, compact and three degree-of-freedoms (DOFs) micropositioner with large travel ranges is presented. The design of the micropositioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and uses the optical sensors to achieve the object of 3-DOF precise motion. An adaptive sliding-mode controller is proposed to let the system is more robust and stable in positioning. The developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allocation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demonstrated.

Original language	English
Title of host publication	Proceedings of the 2006 American Control Conference
Pages	1098-1103
Number of pages	6
Publication status	Published - 2006
Event	2006 American Control Conference - Minneapolis, MN, United States Duration: 2006 Jun 14 → 2006 Jun 16

Publication series

Name	Proceedings of the American Control Conference
Volume	2006
ISSN (Print)	0743-1619

Other

Other	2006 American Control Conference
Country/Territory	United States
City	Minneapolis, MN
Period	2006/06/14 → 2006/06/16

Keywords

Adaptive sliding-mode controller
Micropositioner
Parallel flexure mechanism
Precision positioning

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism. / Chen, Mei Yung; Huang, Hsuan Han; Hung, Shao Kang et al.
Proceedings of the 2006 American Control Conference. 2006. p. 1098-1103 1656363 (Proceedings of the American Control Conference; Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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title = "Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism",

abstract = "In this paper, a novel, compact and three degree-of-freedoms (DOFs) micropositioner with large travel ranges is presented. The design of the micropositioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and uses the optical sensors to achieve the object of 3-DOF precise motion. An adaptive sliding-mode controller is proposed to let the system is more robust and stable in positioning. The developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allocation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demonstrated.",

keywords = "Adaptive sliding-mode controller, Micropositioner, Parallel flexure mechanism, Precision positioning",

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AU - Chen, Mei Yung

AU - Huang, Hsuan Han

AU - Hung, Shao Kang

AU - Fu, Li Chen

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N2 - In this paper, a novel, compact and three degree-of-freedoms (DOFs) micropositioner with large travel ranges is presented. The design of the micropositioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and uses the optical sensors to achieve the object of 3-DOF precise motion. An adaptive sliding-mode controller is proposed to let the system is more robust and stable in positioning. The developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allocation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demonstrated.

AB - In this paper, a novel, compact and three degree-of-freedoms (DOFs) micropositioner with large travel ranges is presented. The design of the micropositioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and uses the optical sensors to achieve the object of 3-DOF precise motion. An adaptive sliding-mode controller is proposed to let the system is more robust and stable in positioning. The developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allocation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demonstrated.

KW - Adaptive sliding-mode controller

KW - Micropositioner

KW - Parallel flexure mechanism

KW - Precision positioning

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T3 - Proceedings of the American Control Conference

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Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism

Abstract

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Keywords

ASJC Scopus subject areas

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