Design and implementation of a large measurement-range AFM scanning system

Jim Wei Wu*, Yuan Zhi Peng, Jyun Jhih Chen, Kuan Chia Huang, Mei Yung Chen, Li Chen Fu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)


Atomic force microscopy (AFM) opens a new window to the nano-world. It is a widely used tool in nano measurement techniques. However, a traditional AFM system suffers from the limitation of small scanning range, due to the short traveling range of piezoelectric positioners. In this paper, we propose a large measurement-range AFM scanning system which combines both fine positioners of piezoelectric and electromagnetic actuators. While the piezoelectric actuation positioner (PAP) provides high speed scanning with nanometer resolution in the z-axis, the precision electromagnetic positioner (PEP) is capable of 1 mm 2 large field positioning with 20 nm rms error in the xy axes. The overall design of the stage consists of 4 pairs of electromagnetic actuators, monolithic serial flexure guidance with compression springs, an eddy current damper, and a commercial z-axis PAP. Given that there are 1 DOF in PAP and 2 DOF in PEP, the scanning positioners can achieve a large field image scanning. Besides, a stationary compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is used to measure the amplitude of the probe. Moreover, an adaptive sliding mode controller based on the analytical modeling is used to overcome the unmodeled system uncertainties, coupling motion and external noises, including the scanning disturbances. Finally, extensive experiments are conducted, demonstrating feasibility of the proposed system.

Original languageEnglish
Title of host publication2012 American Control Conference, ACC 2012
Number of pages6
Publication statusPublished - 2012
Externally publishedYes
Event2012 American Control Conference, ACC 2012 - Montreal, QC, Canada
Duration: 2012 Jun 272012 Jun 29

Publication series

NameProceedings of the American Control Conference
ISSN (Print)0743-1619


Other2012 American Control Conference, ACC 2012
CityMontreal, QC


  • AFM
  • Nano control
  • adaptive sliding mode control
  • electromagnetic actuation positioner
  • piezoelectric actuation positioner

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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