TY - GEN
T1 - Design and implementation of a large measurement-range AFM scanning system
AU - Wu, Jim Wei
AU - Peng, Yuan Zhi
AU - Chen, Jyun Jhih
AU - Huang, Kuan Chia
AU - Chen, Mei Yung
AU - Fu, Li Chen
PY - 2012
Y1 - 2012
N2 - Atomic force microscopy (AFM) opens a new window to the nano-world. It is a widely used tool in nano measurement techniques. However, a traditional AFM system suffers from the limitation of small scanning range, due to the short traveling range of piezoelectric positioners. In this paper, we propose a large measurement-range AFM scanning system which combines both fine positioners of piezoelectric and electromagnetic actuators. While the piezoelectric actuation positioner (PAP) provides high speed scanning with nanometer resolution in the z-axis, the precision electromagnetic positioner (PEP) is capable of 1 mm 2 large field positioning with 20 nm rms error in the xy axes. The overall design of the stage consists of 4 pairs of electromagnetic actuators, monolithic serial flexure guidance with compression springs, an eddy current damper, and a commercial z-axis PAP. Given that there are 1 DOF in PAP and 2 DOF in PEP, the scanning positioners can achieve a large field image scanning. Besides, a stationary compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is used to measure the amplitude of the probe. Moreover, an adaptive sliding mode controller based on the analytical modeling is used to overcome the unmodeled system uncertainties, coupling motion and external noises, including the scanning disturbances. Finally, extensive experiments are conducted, demonstrating feasibility of the proposed system.
AB - Atomic force microscopy (AFM) opens a new window to the nano-world. It is a widely used tool in nano measurement techniques. However, a traditional AFM system suffers from the limitation of small scanning range, due to the short traveling range of piezoelectric positioners. In this paper, we propose a large measurement-range AFM scanning system which combines both fine positioners of piezoelectric and electromagnetic actuators. While the piezoelectric actuation positioner (PAP) provides high speed scanning with nanometer resolution in the z-axis, the precision electromagnetic positioner (PEP) is capable of 1 mm 2 large field positioning with 20 nm rms error in the xy axes. The overall design of the stage consists of 4 pairs of electromagnetic actuators, monolithic serial flexure guidance with compression springs, an eddy current damper, and a commercial z-axis PAP. Given that there are 1 DOF in PAP and 2 DOF in PEP, the scanning positioners can achieve a large field image scanning. Besides, a stationary compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is used to measure the amplitude of the probe. Moreover, an adaptive sliding mode controller based on the analytical modeling is used to overcome the unmodeled system uncertainties, coupling motion and external noises, including the scanning disturbances. Finally, extensive experiments are conducted, demonstrating feasibility of the proposed system.
KW - AFM
KW - CD/DVD PUH
KW - Nano control
KW - adaptive sliding mode control
KW - electromagnetic actuation positioner
KW - piezoelectric actuation positioner
UR - http://www.scopus.com/inward/record.url?scp=84869402952&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84869402952&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84869402952
SN - 9781457710957
T3 - Proceedings of the American Control Conference
SP - 895
EP - 900
BT - 2012 American Control Conference, ACC 2012
T2 - 2012 American Control Conference, ACC 2012
Y2 - 27 June 2012 through 29 June 2012
ER -