TY - JOUR
T1 - Design and experiment of a macro-micro planar maglev positioning system
AU - Chen, Mei Yung
AU - Lin, Tzuo Bo
AU - Hung, Shao Kang
AU - Fu, Li Chen
N1 - Funding Information:
Manuscript received November 8, 2010; revised May 11, 2011 and October 11, 2011; accepted October 14, 2011. Date of publication November 2, 2011; date of current version June 19, 2012. This work was supported by the National Science Council, Taiwan, under Grants NSC 98-2511-S-003-026 and 100-2221-E-002-082-MY3. M.-Y. Chen is with the Department of Mechatronic Technology, National Taiwan Normal University, Taipei 10610, Taiwan (e-mail: [email protected]). T.-B. Lin was with National Taiwan University, Taipei 10617, Taiwan. He is now with the Realtek Semiconductor Corporation, Hsinchu 300, Taiwan (e-mail: [email protected]). S.-K. Hung is with National Chiao Tung University, Hsinchu 300, Taiwan (e-mail: [email protected]). L.-C. Fu is with the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan (e-mail: [email protected]). Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TIE.2011.2174531
PY - 2012/11
Y1 - 2012/11
N2 - In this paper, a new planar magnetic levitation (maglev) positioning system is proposed, which is capable of executing dual-axis planar motions purely involving magnetic forces. Functionally, such a mechanism behaves like a planar XY table with micrometer precision. Specifically, in this system, a new structure with an adaptive sliding-mode control (ASMC) algorithm is described, which aims to achieve the following three goals: 1) a large moving range (millimeter level); 2) precise positioning (micrometer level); and 3) fast response. The system consists of a moving carrier platform, six permanent magnets (PMs) attached to the carrier, and six electromagnets mounted on a fixed base. After exploring the characteristics of the magnetic forces between PMs and electromagnets, the general 6-DOF dynamic model of this system is derived and analyzed. Then, because of the naturally unstable behavior inherent in maglev systems, the proposed ASMC guarantees satisfactory performance of the maglev system. Experiments have successfully demonstrated the feasibility and effectiveness of the overall system.
AB - In this paper, a new planar magnetic levitation (maglev) positioning system is proposed, which is capable of executing dual-axis planar motions purely involving magnetic forces. Functionally, such a mechanism behaves like a planar XY table with micrometer precision. Specifically, in this system, a new structure with an adaptive sliding-mode control (ASMC) algorithm is described, which aims to achieve the following three goals: 1) a large moving range (millimeter level); 2) precise positioning (micrometer level); and 3) fast response. The system consists of a moving carrier platform, six permanent magnets (PMs) attached to the carrier, and six electromagnets mounted on a fixed base. After exploring the characteristics of the magnetic forces between PMs and electromagnets, the general 6-DOF dynamic model of this system is derived and analyzed. Then, because of the naturally unstable behavior inherent in maglev systems, the proposed ASMC guarantees satisfactory performance of the maglev system. Experiments have successfully demonstrated the feasibility and effectiveness of the overall system.
KW - Adaptive sliding-mode controller
KW - magnetic levitation (maglev)
KW - precision positioning
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U2 - 10.1109/TIE.2011.2174531
DO - 10.1109/TIE.2011.2174531
M3 - Article
AN - SCOPUS:84862993042
SN - 0278-0046
VL - 59
SP - 4128
EP - 4139
JO - IEEE Transactions on Industrial Electronics
JF - IEEE Transactions on Industrial Electronics
IS - 11
M1 - 6068244
ER -