Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments

Jim Wei Wu, Jyun Jhih Chen, Kuan Chia Huang, Chih Lieh Chen, Yi Ting Lin, Mei Yung Chen, Li Chen Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this paper, we propose a homemade phase-detection mode atomic force microscopy (PM-AFM). In measuring system, here we use a compact CD/DVD pick-up-head to measure the cantilever deflection. In scanning system, we use piezoelectric stages as the planar scanner. For the sake of accurately obtaining the contour of tender cells, first we design an MIMO adaptive double integral sliding mode controller (ADISMC) in xy-plane to increase the positioning accuracy and provide precision cell size. Second, in z-axis we design an adaptive complementary sliding-mode controller (ACSMC) to improve the scanning accuracy and to overcome the inconvenience for user with traditional proportional-integration controller. Besides, we use phase feedback signal, which features with higher sensitivity and faster response. Finally, the extensive experimental results are used to validate the performance of the proposed controller, quantify the scanning image quality of standard grating and reconstruct cells topography.

Original languageEnglish
Title of host publication2013 American Control Conference, ACC 2013
Pages5488-5493
Number of pages6
Publication statusPublished - 2013
Externally publishedYes
Event2013 1st American Control Conference, ACC 2013 - Washington, DC, United States
Duration: 2013 Jun 172013 Jun 19

Other

Other2013 1st American Control Conference, ACC 2013
CountryUnited States
CityWashington, DC
Period13/6/1713/6/19

Fingerprint

Atomic force microscopy
Controllers
Scanning
Videodisks
MIMO systems
Topography
Image quality
Microscopes
Feedback
Imaging techniques
Microstructure

Keywords

  • adaptive complementary sliding mode control
  • adaptive double integral sliding mode control
  • Atomic force microscopy
  • CD/DVD PUH
  • phase-detection mode

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Wu, J. W., Chen, J. J., Huang, K. C., Chen, C. L., Lin, Y. T., Chen, M. Y., & Fu, L. C. (2013). Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments. In 2013 American Control Conference, ACC 2013 (pp. 5488-5493). [6580696]

Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments. / Wu, Jim Wei; Chen, Jyun Jhih; Huang, Kuan Chia; Chen, Chih Lieh; Lin, Yi Ting; Chen, Mei Yung; Fu, Li Chen.

2013 American Control Conference, ACC 2013. 2013. p. 5488-5493 6580696.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wu, JW, Chen, JJ, Huang, KC, Chen, CL, Lin, YT, Chen, MY & Fu, LC 2013, Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments. in 2013 American Control Conference, ACC 2013., 6580696, pp. 5488-5493, 2013 1st American Control Conference, ACC 2013, Washington, DC, United States, 13/6/17.
Wu JW, Chen JJ, Huang KC, Chen CL, Lin YT, Chen MY et al. Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments. In 2013 American Control Conference, ACC 2013. 2013. p. 5488-5493. 6580696
Wu, Jim Wei ; Chen, Jyun Jhih ; Huang, Kuan Chia ; Chen, Chih Lieh ; Lin, Yi Ting ; Chen, Mei Yung ; Fu, Li Chen. / Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments. 2013 American Control Conference, ACC 2013. 2013. pp. 5488-5493
@inproceedings{69ecfeb1e61f4a0283c98fcba44a9d1a,
title = "Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments",
abstract = "Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this paper, we propose a homemade phase-detection mode atomic force microscopy (PM-AFM). In measuring system, here we use a compact CD/DVD pick-up-head to measure the cantilever deflection. In scanning system, we use piezoelectric stages as the planar scanner. For the sake of accurately obtaining the contour of tender cells, first we design an MIMO adaptive double integral sliding mode controller (ADISMC) in xy-plane to increase the positioning accuracy and provide precision cell size. Second, in z-axis we design an adaptive complementary sliding-mode controller (ACSMC) to improve the scanning accuracy and to overcome the inconvenience for user with traditional proportional-integration controller. Besides, we use phase feedback signal, which features with higher sensitivity and faster response. Finally, the extensive experimental results are used to validate the performance of the proposed controller, quantify the scanning image quality of standard grating and reconstruct cells topography.",
keywords = "adaptive complementary sliding mode control, adaptive double integral sliding mode control, Atomic force microscopy, CD/DVD PUH, phase-detection mode",
author = "Wu, {Jim Wei} and Chen, {Jyun Jhih} and Huang, {Kuan Chia} and Chen, {Chih Lieh} and Lin, {Yi Ting} and Chen, {Mei Yung} and Fu, {Li Chen}",
year = "2013",
language = "English",
isbn = "9781479901777",
pages = "5488--5493",
booktitle = "2013 American Control Conference, ACC 2013",

}

TY - GEN

T1 - Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments

AU - Wu, Jim Wei

AU - Chen, Jyun Jhih

AU - Huang, Kuan Chia

AU - Chen, Chih Lieh

AU - Lin, Yi Ting

AU - Chen, Mei Yung

AU - Fu, Li Chen

PY - 2013

Y1 - 2013

N2 - Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this paper, we propose a homemade phase-detection mode atomic force microscopy (PM-AFM). In measuring system, here we use a compact CD/DVD pick-up-head to measure the cantilever deflection. In scanning system, we use piezoelectric stages as the planar scanner. For the sake of accurately obtaining the contour of tender cells, first we design an MIMO adaptive double integral sliding mode controller (ADISMC) in xy-plane to increase the positioning accuracy and provide precision cell size. Second, in z-axis we design an adaptive complementary sliding-mode controller (ACSMC) to improve the scanning accuracy and to overcome the inconvenience for user with traditional proportional-integration controller. Besides, we use phase feedback signal, which features with higher sensitivity and faster response. Finally, the extensive experimental results are used to validate the performance of the proposed controller, quantify the scanning image quality of standard grating and reconstruct cells topography.

AB - Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this paper, we propose a homemade phase-detection mode atomic force microscopy (PM-AFM). In measuring system, here we use a compact CD/DVD pick-up-head to measure the cantilever deflection. In scanning system, we use piezoelectric stages as the planar scanner. For the sake of accurately obtaining the contour of tender cells, first we design an MIMO adaptive double integral sliding mode controller (ADISMC) in xy-plane to increase the positioning accuracy and provide precision cell size. Second, in z-axis we design an adaptive complementary sliding-mode controller (ACSMC) to improve the scanning accuracy and to overcome the inconvenience for user with traditional proportional-integration controller. Besides, we use phase feedback signal, which features with higher sensitivity and faster response. Finally, the extensive experimental results are used to validate the performance of the proposed controller, quantify the scanning image quality of standard grating and reconstruct cells topography.

KW - adaptive complementary sliding mode control

KW - adaptive double integral sliding mode control

KW - Atomic force microscopy

KW - CD/DVD PUH

KW - phase-detection mode

UR - http://www.scopus.com/inward/record.url?scp=84883548958&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883548958&partnerID=8YFLogxK

M3 - Conference contribution

SN - 9781479901777

SP - 5488

EP - 5493

BT - 2013 American Control Conference, ACC 2013

ER -