Abstract
Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this paper, we propose a homemade phase-detection mode atomic force microscopy (PM-AFM). In measuring system, here we use a compact CD/DVD pick-up-head to measure the cantilever deflection. In scanning system, we use piezoelectric stages as the planar scanner. For the sake of accurately obtaining the contour of tender cells, first we design an MIMO adaptive double integral sliding mode controller (ADISMC) in xy-plane to increase the positioning accuracy and provide precision cell size. Second, in z-axis we design an adaptive complementary sliding-mode controller (ACSMC) to improve the scanning accuracy and to overcome the inconvenience for user with traditional proportional-integration controller. Besides, we use phase feedback signal, which features with higher sensitivity and faster response. Finally, the extensive experimental results are used to validate the performance of the proposed controller, quantify the scanning image quality of standard grating and reconstruct cells topography.
| Original language | English |
|---|---|
| Title of host publication | 2013 American Control Conference, ACC 2013 |
| Pages | 5488-5493 |
| Number of pages | 6 |
| Publication status | Published - 2013 |
| Externally published | Yes |
| Event | 2013 1st American Control Conference, ACC 2013 - Washington, DC, United States Duration: 2013 Jun 17 → 2013 Jun 19 |
Other
| Other | 2013 1st American Control Conference, ACC 2013 |
|---|---|
| Country | United States |
| City | Washington, DC |
| Period | 13/6/17 → 13/6/19 |
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Keywords
- adaptive complementary sliding mode control
- adaptive double integral sliding mode control
- Atomic force microscopy
- CD/DVD PUH
- phase-detection mode
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments. / Wu, Jim Wei; Chen, Jyun Jhih; Huang, Kuan Chia; Chen, Chih Lieh; Lin, Yi Ting; Chen, Mei Yung; Fu, Li Chen.
2013 American Control Conference, ACC 2013. 2013. p. 5488-5493 6580696.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments
AU - Wu, Jim Wei
AU - Chen, Jyun Jhih
AU - Huang, Kuan Chia
AU - Chen, Chih Lieh
AU - Lin, Yi Ting
AU - Chen, Mei Yung
AU - Fu, Li Chen
PY - 2013
Y1 - 2013
N2 - Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this paper, we propose a homemade phase-detection mode atomic force microscopy (PM-AFM). In measuring system, here we use a compact CD/DVD pick-up-head to measure the cantilever deflection. In scanning system, we use piezoelectric stages as the planar scanner. For the sake of accurately obtaining the contour of tender cells, first we design an MIMO adaptive double integral sliding mode controller (ADISMC) in xy-plane to increase the positioning accuracy and provide precision cell size. Second, in z-axis we design an adaptive complementary sliding-mode controller (ACSMC) to improve the scanning accuracy and to overcome the inconvenience for user with traditional proportional-integration controller. Besides, we use phase feedback signal, which features with higher sensitivity and faster response. Finally, the extensive experimental results are used to validate the performance of the proposed controller, quantify the scanning image quality of standard grating and reconstruct cells topography.
AB - Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this paper, we propose a homemade phase-detection mode atomic force microscopy (PM-AFM). In measuring system, here we use a compact CD/DVD pick-up-head to measure the cantilever deflection. In scanning system, we use piezoelectric stages as the planar scanner. For the sake of accurately obtaining the contour of tender cells, first we design an MIMO adaptive double integral sliding mode controller (ADISMC) in xy-plane to increase the positioning accuracy and provide precision cell size. Second, in z-axis we design an adaptive complementary sliding-mode controller (ACSMC) to improve the scanning accuracy and to overcome the inconvenience for user with traditional proportional-integration controller. Besides, we use phase feedback signal, which features with higher sensitivity and faster response. Finally, the extensive experimental results are used to validate the performance of the proposed controller, quantify the scanning image quality of standard grating and reconstruct cells topography.
KW - adaptive complementary sliding mode control
KW - adaptive double integral sliding mode control
KW - Atomic force microscopy
KW - CD/DVD PUH
KW - phase-detection mode
UR - http://www.scopus.com/inward/record.url?scp=84883548958&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84883548958&partnerID=8YFLogxK
M3 - Conference contribution
SN - 9781479901777
SP - 5488
EP - 5493
BT - 2013 American Control Conference, ACC 2013
ER -