Depth profiling the electronic structures at HfO2/Si interface grown by molecular beam epitaxy

T. S. Lay, S. C. Chang, G. J. Din, C. C. Yeh, W. H. Hung, W. G. Lee, J. Kwo, M. Hong

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The depth profile of the HfO2 Si interface grown by molecular beam epitaxy (MBE) has been investigated by high-resolution x-ray photoelectron spectroscopy using synchrotron radiation beam and low energy Ar+ sputtering. At the interfacial layer, the Hf 4f spectra show a Hf silicide state without a Hf silicate signal. The O 1s and Si 2p spectra show weakly two silicon oxidation states of SiO and SiO2. The data suggest an inward reaction of the Hf and O species into the Si substrate during the MBE growth. The valence band offset (Δ EV) of ∼3.5 eV is obtained for the HfO2 Si interface by measuring the valence-band edges of HfO2 and Si.

Original languageEnglish
Pages (from-to)1291-1293
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume23
Issue number3
DOIs
Publication statusPublished - 2005 Dec 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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