Depth profiles of MeV C+ and C2+ ions implanted in III-V semiconductors

Tzuen-Rong Yang, G. Kuri, D. Fink

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A study has been made to investigate the depth profiles of MeV C atoms implanted in a few common III-V semiconducting targets. Single crystal substrates of GaP, GaAs, GaSb, InP and InSb were used in the present study. They were implanted with C+ and C2 + ions at implantation energies of 1.00 and 2.00 MeV respectively, and a dose of 5×1014 C-atoms cm-2. The projected range and longitudinal straggling of the implanted C atoms have been measured by the secondary ion mass spectroscopy (SIMS) technique and compared with the theoretical predictions. The measured range parameters of C+ ions agree moderately well with the theory (TRIM) but the longitudinal straggling is significantly greater in the case of C2 + implantations. In this case the measured Rp values are also slightly lower as compared to that target implanted with C+ ions. A tentative explanation for these results is presented.

Original languageEnglish
Pages (from-to)143-148
Number of pages6
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume68
Issue number3
DOIs
Publication statusPublished - 2000 Jan 3

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Ions
profiles
Atoms
implantation
ions
atoms
Ion implantation
mass spectroscopy
Single crystals
Spectroscopy
dosage
III-V semiconductors
single crystals
Substrates
predictions
energy
gallium arsenide

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Depth profiles of MeV C+ and C2+ ions implanted in III-V semiconductors. / Yang, Tzuen-Rong; Kuri, G.; Fink, D.

In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, Vol. 68, No. 3, 03.01.2000, p. 143-148.

Research output: Contribution to journalArticle

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