Depth profiles and chemical bonding states of graded doping and ultra-thin HfLaO high-k dielectrics deposited on silicon substrate

Pi Chun Juan*, Chuan-Hsi Liu, Min Jou, Yi Kuan Chen, Yu Wei Liu, Chih Wei Hsu, Yi Hsien Chou, Jun You Lin

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science