Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method

Chin Guo Kuo; I. Chun Lin; Chia I. Chuang; Cheng Fu Yang; Hsuan Yu Yang; Chia Ching Wu

doi:10.1201/b18737-5

Deposition of ZnO-In₂O₃-Ga₂O₃ (IGZO) thin films by using spray coating method

Chin Guo Kuo, I. Chun Lin, Chia I. Chuang, Cheng Fu Yang, Hsuan Yu Yang, Chia Ching Wu

Department of Industrial Education

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

In this study, the micro-scale of In₂O₃, Ga₂O₃, and ZnO oxide powders (with mole ratio In₂O₃: Ga₂O₃: ZnO = 1:1:2, abbreviated as IGZO) were put into a nano-ground machine with the addition of 1 wt% KD1 dispersant for nano-scale IGZO particles’ dispersion. Then the 6 wt% IGZO particles were dispersed into Isopropyl Alcohol (IPA) to get the solution for SPM to prepare the IGZO thin films. 0.1 ml IGZO solution was sprayed on the 2 cm × 1 cm glass substrates and then the nano-scale IGZO solution was carried out for thermal treatment under different temperatures in a furnace in air. The annealing temperature was changed from 200°C to 700°C and the annealing time was 3 h. The effects of the annealing temperature on the surface and cross-session morphologies, X-ray diffraction pattern, optical transmission spectrum, carrier concentration, carrier mobility, and resistivity of the IGZO thin films on glass substrates were studied. The measured results showed that the annealing temperature had large effect on the characteristics of the IGZO thin films.

Original language	English
Title of host publication	Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014
Editors	Teen-Hang Meen, Stephen D. Prior, Artde Donald Kin-Tak Lam
Publisher	CRC Press/Balkema
Pages	11-14
Number of pages	4
ISBN (Print)	9781138027527
DOIs	https://doi.org/10.1201/b18737-5
Publication status	Published - 2015
Event	3rd International Conference on Innovation, Communication and Engineering, ICICE 2014 - Guiyang, Guizhou, China Duration: 2014 Oct 17 → 2014 Oct 22

Publication series

Name	Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014

Other

Other	3rd International Conference on Innovation, Communication and Engineering, ICICE 2014
Country/Territory	China
City	Guiyang, Guizhou
Period	2014/10/17 → 2014/10/22

Keywords

Annealing
IGZO
Nano-scale
Spray Coating Method

ASJC Scopus subject areas

Computer Networks and Communications
Information Systems

Access to Document

10.1201/b18737-5

Cite this

Kuo, C. G., Lin, I. C., Chuang, C. I., Yang, C. F., Yang, H. Y., & Wu, C. C. (2015). Deposition of ZnO-In₂O₃-Ga₂O₃ (IGZO) thin films by using spray coating method. In T.-H. Meen, S. D. Prior, & A. D. K.-T. Lam (Eds.), Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014 (pp. 11-14). (Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014). CRC Press/Balkema. https://doi.org/10.1201/b18737-5

Deposition of ZnO-In₂O₃-Ga₂O₃ (IGZO) thin films by using spray coating method. / Kuo, Chin Guo; Lin, I. Chun; Chuang, Chia I. et al.
Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014. ed. / Teen-Hang Meen; Stephen D. Prior; Artde Donald Kin-Tak Lam. CRC Press/Balkema, 2015. p. 11-14 (Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kuo, CG, Lin, IC, Chuang, CI, Yang, CF, Yang, HY & Wu, CC 2015, Deposition of ZnO-In₂O₃-Ga₂O₃ (IGZO) thin films by using spray coating method. in T-H Meen, SD Prior & ADK-T Lam (eds), Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014. Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014, CRC Press/Balkema, pp. 11-14, 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014, Guiyang, Guizhou, China, 2014/10/17. https://doi.org/10.1201/b18737-5

Kuo CG, Lin IC, Chuang CI, Yang CF, Yang HY, Wu CC. Deposition of ZnO-In₂O₃-Ga₂O₃ (IGZO) thin films by using spray coating method. In Meen TH, Prior SD, Lam ADKT, editors, Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014. CRC Press/Balkema. 2015. p. 11-14. (Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014). doi: 10.1201/b18737-5

Kuo, Chin Guo ; Lin, I. Chun ; Chuang, Chia I. et al. / Deposition of ZnO-In₂O₃-Ga₂O₃ (IGZO) thin films by using spray coating method. Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014. editor / Teen-Hang Meen ; Stephen D. Prior ; Artde Donald Kin-Tak Lam. CRC Press/Balkema, 2015. pp. 11-14 (Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014).

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abstract = "In this study, the micro-scale of In2O3, Ga2O3, and ZnO oxide powders (with mole ratio In2O3: Ga2O3: ZnO = 1:1:2, abbreviated as IGZO) were put into a nano-ground machine with the addition of 1 wt% KD1 dispersant for nano-scale IGZO particles{\textquoteright} dispersion. Then the 6 wt% IGZO particles were dispersed into Isopropyl Alcohol (IPA) to get the solution for SPM to prepare the IGZO thin films. 0.1 ml IGZO solution was sprayed on the 2 cm × 1 cm glass substrates and then the nano-scale IGZO solution was carried out for thermal treatment under different temperatures in a furnace in air. The annealing temperature was changed from 200°C to 700°C and the annealing time was 3 h. The effects of the annealing temperature on the surface and cross-session morphologies, X-ray diffraction pattern, optical transmission spectrum, carrier concentration, carrier mobility, and resistivity of the IGZO thin films on glass substrates were studied. The measured results showed that the annealing temperature had large effect on the characteristics of the IGZO thin films.",

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AB - In this study, the micro-scale of In2O3, Ga2O3, and ZnO oxide powders (with mole ratio In2O3: Ga2O3: ZnO = 1:1:2, abbreviated as IGZO) were put into a nano-ground machine with the addition of 1 wt% KD1 dispersant for nano-scale IGZO particles’ dispersion. Then the 6 wt% IGZO particles were dispersed into Isopropyl Alcohol (IPA) to get the solution for SPM to prepare the IGZO thin films. 0.1 ml IGZO solution was sprayed on the 2 cm × 1 cm glass substrates and then the nano-scale IGZO solution was carried out for thermal treatment under different temperatures in a furnace in air. The annealing temperature was changed from 200°C to 700°C and the annealing time was 3 h. The effects of the annealing temperature on the surface and cross-session morphologies, X-ray diffraction pattern, optical transmission spectrum, carrier concentration, carrier mobility, and resistivity of the IGZO thin films on glass substrates were studied. The measured results showed that the annealing temperature had large effect on the characteristics of the IGZO thin films.

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