Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method

Chin Guo Kuo, I. Chun Lin, Chia I. Chuang, Cheng Fu Yang, Hsuan Yu Yang, Chia Ching Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this study, the micro-scale of In2O3, Ga2O3, and ZnO oxide powders (with mole ratio In2O3: Ga2O3: ZnO = 1:1:2, abbreviated as IGZO) were put into a nano-ground machine with the addition of 1 wt% KD1 dispersant for nano-scale IGZO particles’ dispersion. Then the 6 wt% IGZO particles were dispersed into Isopropyl Alcohol (IPA) to get the solution for SPM to prepare the IGZO thin films. 0.1 ml IGZO solution was sprayed on the 2 cm × 1 cm glass substrates and then the nano-scale IGZO solution was carried out for thermal treatment under different temperatures in a furnace in air. The annealing temperature was changed from 200°C to 700°C and the annealing time was 3 h. The effects of the annealing temperature on the surface and cross-session morphologies, X-ray diffraction pattern, optical transmission spectrum, carrier concentration, carrier mobility, and resistivity of the IGZO thin films on glass substrates were studied. The measured results showed that the annealing temperature had large effect on the characteristics of the IGZO thin films.

Original languageEnglish
Title of host publicationInnovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014
EditorsTeen-Hang Meen, Stephen D. Prior, Artde Donald Kin-Tak Lam
PublisherCRC Press/Balkema
Pages11-14
Number of pages4
ISBN (Print)9781138027527
DOIs
Publication statusPublished - 2015 Jan 1
Event3rd International Conference on Innovation, Communication and Engineering, ICICE 2014 - Guiyang, Guizhou, China
Duration: 2014 Oct 172014 Oct 22

Publication series

NameInnovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014

Other

Other3rd International Conference on Innovation, Communication and Engineering, ICICE 2014
CountryChina
CityGuiyang, Guizhou
Period14/10/1714/10/22

Keywords

  • Annealing
  • IGZO
  • Nano-scale
  • Spray Coating Method

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Information Systems

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  • Cite this

    Kuo, C. G., Lin, I. C., Chuang, C. I., Yang, C. F., Yang, H. Y., & Wu, C. C. (2015). Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method. In T-H. Meen, S. D. Prior, & A. D. K-T. Lam (Eds.), Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014 (pp. 11-14). (Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014). CRC Press/Balkema. https://doi.org/10.1201/b18737-5