Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method

Chin-Guo Kuo, I. Chun Lin, Chia I. Chuang, Cheng Fu Yang, Hsuan Yu Yang, Chia Ching Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this study, the micro-scale of In2O3, Ga2O3, and ZnO oxide powders (with mole ratio In2O3: Ga2O3: ZnO = 1:1:2, abbreviated as IGZO) were put into a nano-ground machine with the addition of 1 wt% KD1 dispersant for nano-scale IGZO particles’ dispersion. Then the 6 wt% IGZO particles were dispersed into Isopropyl Alcohol (IPA) to get the solution for SPM to prepare the IGZO thin films. 0.1 ml IGZO solution was sprayed on the 2 cm × 1 cm glass substrates and then the nano-scale IGZO solution was carried out for thermal treatment under different temperatures in a furnace in air. The annealing temperature was changed from 200°C to 700°C and the annealing time was 3 h. The effects of the annealing temperature on the surface and cross-session morphologies, X-ray diffraction pattern, optical transmission spectrum, carrier concentration, carrier mobility, and resistivity of the IGZO thin films on glass substrates were studied. The measured results showed that the annealing temperature had large effect on the characteristics of the IGZO thin films.

Original languageEnglish
Title of host publicationInnovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014
EditorsArtde Donald Kin-Tak Lam, Stephen D. Prior, Teen-Hang Meen
PublisherCRC Press/Balkema
Pages11-14
Number of pages4
ISBN (Print)9781138027527
Publication statusPublished - 2015 Jan 1
Event3rd International Conference on Innovation, Communication and Engineering, ICICE 2014 - Guiyang, Guizhou, China
Duration: 2014 Oct 172014 Oct 22

Publication series

NameInnovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014

Other

Other3rd International Conference on Innovation, Communication and Engineering, ICICE 2014
CountryChina
CityGuiyang, Guizhou
Period14/10/1714/10/22

Fingerprint

Annealing
Thin films
Coatings
Glass
Temperature
Carrier mobility
Substrates
Light transmission
Diffraction patterns
Carrier concentration
Furnaces
Alcohols
Heat treatment
Powders
X ray diffraction
Oxides
Air

Keywords

  • Annealing
  • IGZO
  • Nano-scale
  • Spray Coating Method

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Information Systems

Cite this

Kuo, C-G., Lin, I. C., Chuang, C. I., Yang, C. F., Yang, H. Y., & Wu, C. C. (2015). Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method. In A. D. K-T. Lam, S. D. Prior, & T-H. Meen (Eds.), Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014 (pp. 11-14). (Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014). CRC Press/Balkema.

Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method. / Kuo, Chin-Guo; Lin, I. Chun; Chuang, Chia I.; Yang, Cheng Fu; Yang, Hsuan Yu; Wu, Chia Ching.

Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014. ed. / Artde Donald Kin-Tak Lam; Stephen D. Prior; Teen-Hang Meen. CRC Press/Balkema, 2015. p. 11-14 (Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kuo, C-G, Lin, IC, Chuang, CI, Yang, CF, Yang, HY & Wu, CC 2015, Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method. in ADK-T Lam, SD Prior & T-H Meen (eds), Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014. Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014, CRC Press/Balkema, pp. 11-14, 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014, Guiyang, Guizhou, China, 14/10/17.
Kuo C-G, Lin IC, Chuang CI, Yang CF, Yang HY, Wu CC. Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method. In Lam ADK-T, Prior SD, Meen T-H, editors, Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014. CRC Press/Balkema. 2015. p. 11-14. (Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014).
Kuo, Chin-Guo ; Lin, I. Chun ; Chuang, Chia I. ; Yang, Cheng Fu ; Yang, Hsuan Yu ; Wu, Chia Ching. / Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method. Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014. editor / Artde Donald Kin-Tak Lam ; Stephen D. Prior ; Teen-Hang Meen. CRC Press/Balkema, 2015. pp. 11-14 (Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014).
@inproceedings{8b374cb60b2d4de8bdab5b424fa45a8e,
title = "Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method",
abstract = "In this study, the micro-scale of In2O3, Ga2O3, and ZnO oxide powders (with mole ratio In2O3: Ga2O3: ZnO = 1:1:2, abbreviated as IGZO) were put into a nano-ground machine with the addition of 1 wt{\%} KD1 dispersant for nano-scale IGZO particles’ dispersion. Then the 6 wt{\%} IGZO particles were dispersed into Isopropyl Alcohol (IPA) to get the solution for SPM to prepare the IGZO thin films. 0.1 ml IGZO solution was sprayed on the 2 cm × 1 cm glass substrates and then the nano-scale IGZO solution was carried out for thermal treatment under different temperatures in a furnace in air. The annealing temperature was changed from 200°C to 700°C and the annealing time was 3 h. The effects of the annealing temperature on the surface and cross-session morphologies, X-ray diffraction pattern, optical transmission spectrum, carrier concentration, carrier mobility, and resistivity of the IGZO thin films on glass substrates were studied. The measured results showed that the annealing temperature had large effect on the characteristics of the IGZO thin films.",
keywords = "Annealing, IGZO, Nano-scale, Spray Coating Method",
author = "Chin-Guo Kuo and Lin, {I. Chun} and Chuang, {Chia I.} and Yang, {Cheng Fu} and Yang, {Hsuan Yu} and Wu, {Chia Ching}",
year = "2015",
month = "1",
day = "1",
language = "English",
isbn = "9781138027527",
series = "Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014",
publisher = "CRC Press/Balkema",
pages = "11--14",
editor = "Lam, {Artde Donald Kin-Tak} and Prior, {Stephen D.} and Teen-Hang Meen",
booktitle = "Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014",

}

TY - GEN

T1 - Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method

AU - Kuo, Chin-Guo

AU - Lin, I. Chun

AU - Chuang, Chia I.

AU - Yang, Cheng Fu

AU - Yang, Hsuan Yu

AU - Wu, Chia Ching

PY - 2015/1/1

Y1 - 2015/1/1

N2 - In this study, the micro-scale of In2O3, Ga2O3, and ZnO oxide powders (with mole ratio In2O3: Ga2O3: ZnO = 1:1:2, abbreviated as IGZO) were put into a nano-ground machine with the addition of 1 wt% KD1 dispersant for nano-scale IGZO particles’ dispersion. Then the 6 wt% IGZO particles were dispersed into Isopropyl Alcohol (IPA) to get the solution for SPM to prepare the IGZO thin films. 0.1 ml IGZO solution was sprayed on the 2 cm × 1 cm glass substrates and then the nano-scale IGZO solution was carried out for thermal treatment under different temperatures in a furnace in air. The annealing temperature was changed from 200°C to 700°C and the annealing time was 3 h. The effects of the annealing temperature on the surface and cross-session morphologies, X-ray diffraction pattern, optical transmission spectrum, carrier concentration, carrier mobility, and resistivity of the IGZO thin films on glass substrates were studied. The measured results showed that the annealing temperature had large effect on the characteristics of the IGZO thin films.

AB - In this study, the micro-scale of In2O3, Ga2O3, and ZnO oxide powders (with mole ratio In2O3: Ga2O3: ZnO = 1:1:2, abbreviated as IGZO) were put into a nano-ground machine with the addition of 1 wt% KD1 dispersant for nano-scale IGZO particles’ dispersion. Then the 6 wt% IGZO particles were dispersed into Isopropyl Alcohol (IPA) to get the solution for SPM to prepare the IGZO thin films. 0.1 ml IGZO solution was sprayed on the 2 cm × 1 cm glass substrates and then the nano-scale IGZO solution was carried out for thermal treatment under different temperatures in a furnace in air. The annealing temperature was changed from 200°C to 700°C and the annealing time was 3 h. The effects of the annealing temperature on the surface and cross-session morphologies, X-ray diffraction pattern, optical transmission spectrum, carrier concentration, carrier mobility, and resistivity of the IGZO thin films on glass substrates were studied. The measured results showed that the annealing temperature had large effect on the characteristics of the IGZO thin films.

KW - Annealing

KW - IGZO

KW - Nano-scale

KW - Spray Coating Method

UR - http://www.scopus.com/inward/record.url?scp=84949908254&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84949908254&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84949908254

SN - 9781138027527

T3 - Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014

SP - 11

EP - 14

BT - Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014

A2 - Lam, Artde Donald Kin-Tak

A2 - Prior, Stephen D.

A2 - Meen, Teen-Hang

PB - CRC Press/Balkema

ER -