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Current conduction of 0.72 nm equivalent-oxide-thickness LaO/HfO
2
stacked gate dielectrics
Chuan Hsi Liu
*
, Hung Wen Chen
, Shung Yuan Chen
, Heng Sheng Huang
, Li Wei Cheng
*
Corresponding author for this work
Department of Mechatronic Engineering
Research output
:
Contribution to journal
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Article
›
peer-review
34
Citations (Scopus)
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2
stacked gate dielectrics'. Together they form a unique fingerprint.
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INIS
hafnium oxides
100%
oxides
100%
thickness
100%
dielectrics
100%
laos
100%
emission
66%
height
33%
layers
33%
barriers
33%
interfaces
33%
temperature dependence
33%
leakage
33%
metals
33%
leakage current
33%
capacitors
33%
semiconductor materials
33%
traps
33%
energy levels
33%
tantalum carbides
33%
Engineering
Gate Dielectric
100%
Oxide Thickness
100%
Atomic Layer
50%
Barrier Height
50%
Dielectrics
50%
Metal Oxide Semiconductor
50%
Temperature Dependence
50%
Material Science
Oxide Compound
100%
Dielectric Material
100%
Capacitor
33%
Metal Oxide
33%
Oxide Semiconductor
33%