Correlation between ferroelectricity and nitrogen incorporation of undoped hafnium dioxide thin films
- Jun Dao Luo*
- , Yun Tien Yeh
- , Yu Ying Lai
- , Chia Feng Wu
- , Hao Tung Chung
- , Yi Shao Li
- , Kai Chi Chuang
- , Wei Shuo Li
- , Pin Guang Chen
- , Min Hung Lee
- , Huang Chung Cheng
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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