Correlation between Access Polarization and High Endurance (~ 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2

K. Y. Hsiang; C. Y. Liao; Y. Y. Lin; Z. F. Lou; C. Y. Lin; J. Y. Lee; F. S. Chang; Z. X. Li; H. C. Tseng; C. C. Wang; W. C. Ray; T. H. Hou; T. C. Chen; C. S. Chang; M. H. Lee

doi:10.1109/IRPS48227.2022.9764533

Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂

K. Y. Hsiang
, C. Y. Liao
, Y. Y. Lin
, Z. F. Lou
, C. Y. Lin
, J. Y. Lee
, F. S. Chang
, Z. X. Li
, H. C. Tseng
, C. C. Wang
, W. C. Ray
, T. H. Hou
, T. C. Chen
, C. S. Chang
, M. H. Lee

Undergraduate Program of Electro-Optical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

13 Citations (Scopus)

Abstract

Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.

Original language	English
Title of host publication	2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	P91-P94
ISBN (Electronic)	9781665479509
DOIs	https://doi.org/10.1109/IRPS48227.2022.9764533
Publication status	Published - 2022
Event	2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Dallas, United States Duration: 2022 Mar 27 → 2022 Mar 31

Publication series

Name	IEEE International Reliability Physics Symposium Proceedings
Volume	2022-March
ISSN (Print)	1541-7026

Conference

Conference	2022 IEEE International Reliability Physics Symposium, IRPS 2022
Country/Territory	United States
City	Dallas
Period	2022/03/27 → 2022/03/31

Keywords

Antiferroelectric
Endurance
Ferroelectric
HfZrO2

ASJC Scopus subject areas

General Engineering

Access to Document

10.1109/IRPS48227.2022.9764533

Cite this

Hsiang, K. Y., Liao, C. Y., Lin, Y. Y., Lou, Z. F., Lin, C. Y., Lee, J. Y., Chang, F. S., Li, Z. X., Tseng, H. C., Wang, C. C., Ray, W. C., Hou, T. H., Chen, T. C., Chang, C. S., & Lee, M. H. (2022). Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂. In 2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings (pp. P91-P94). (IEEE International Reliability Physics Symposium Proceedings; Vol. 2022-March). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IRPS48227.2022.9764533

Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂. / Hsiang, K. Y.; Liao, C. Y.; Lin, Y. Y. et al.
2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. p. P91-P94 (IEEE International Reliability Physics Symposium Proceedings; Vol. 2022-March).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hsiang, KY, Liao, CY, Lin, YY, Lou, ZF, Lin, CY, Lee, JY, Chang, FS, Li, ZX, Tseng, HC, Wang, CC, Ray, WC, Hou, TH, Chen, TC, Chang, CS & Lee, MH 2022, Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂. in 2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings. IEEE International Reliability Physics Symposium Proceedings, vol. 2022-March, Institute of Electrical and Electronics Engineers Inc., pp. P91-P94, 2022 IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, United States, 2022/03/27. https://doi.org/10.1109/IRPS48227.2022.9764533

Hsiang KY, Liao CY, Lin YY, Lou ZF, Lin CY, Lee JY et al. Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂. In 2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2022. p. P91-P94. (IEEE International Reliability Physics Symposium Proceedings). doi: 10.1109/IRPS48227.2022.9764533

Hsiang, K. Y. ; Liao, C. Y. ; Lin, Y. Y. et al. / Correlation between Access Polarization and High Endurance (~ 10¹²cycling) of Ferroelectric and Anti-Ferroelectric HfZrO₂. 2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. pp. P91-P94 (IEEE International Reliability Physics Symposium Proceedings).

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title = "Correlation between Access Polarization and High Endurance (\textasciitilde{} 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2",

abstract = "Endurance \textasciitilde{} 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE \textasciitilde{} 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.",

keywords = "Antiferroelectric, Endurance, Ferroelectric, HfZrO2",

author = "Hsiang, \{K. Y.\} and Liao, \{C. Y.\} and Lin, \{Y. Y.\} and Lou, \{Z. F.\} and Lin, \{C. Y.\} and Lee, \{J. Y.\} and Chang, \{F. S.\} and Li, \{Z. X.\} and Tseng, \{H. C.\} and Wang, \{C. C.\} and Ray, \{W. C.\} and Hou, \{T. H.\} and Chen, \{T. C.\} and Chang, \{C. S.\} and Lee, \{M. H.\}",

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AU - Lin, Y. Y.

AU - Lou, Z. F.

AU - Lin, C. Y.

AU - Lee, J. Y.

AU - Chang, F. S.

AU - Li, Z. X.

AU - Tseng, H. C.

AU - Wang, C. C.

AU - Ray, W. C.

AU - Hou, T. H.

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N2 - Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.

AB - Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.

KW - Antiferroelectric

KW - Endurance

KW - Ferroelectric

KW - HfZrO2

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BT - 2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings

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