Correlation between Access Polarization and High Endurance (~ 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2

K. Y. Hsiang, C. Y. Liao, Y. Y. Lin, Z. F. Lou, C. Y. Lin, J. Y. Lee, F. S. Chang, Z. X. Li, H. C. Tseng, C. C. Wang, W. C. Ray, T. H. Hou, T. C. Chen, C. S. Chang, M. H. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.

Original languageEnglish
Title of host publication2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
PagesP91-P94
ISBN (Electronic)9781665479509
DOIs
Publication statusPublished - 2022
Event2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Dallas, United States
Duration: 2022 Mar 272022 Mar 31

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
Volume2022-March
ISSN (Print)1541-7026

Conference

Conference2022 IEEE International Reliability Physics Symposium, IRPS 2022
Country/TerritoryUnited States
CityDallas
Period2022/03/272022/03/31

Keywords

  • Antiferroelectric
  • Endurance
  • Ferroelectric
  • HfZrO2

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint

Dive into the research topics of 'Correlation between Access Polarization and High Endurance (~ 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2'. Together they form a unique fingerprint.

Cite this