Controlled growth of aluminium nitride nanorod arrays via chemical vapour deposition

Jian Yang, Ting Wei Liu, Chi Wei Hsu, Li Chyong Chen, Kuei Hsien Chen, Chia Chun Chen

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

Large-area and high-density arrays of AlN nanorods were synthesized at low temperature via a template-free and catalyst-free chemical vapour deposition. The quasi-aligned AlN nanorods were identified to grow along the c-axis and preferentially orient with their growth direction perpendicular to the substrate. Further studies showed that the AlN nanorods were grown on a buffer layer formed at the beginning of the reaction. By changing the flow rate of the carrier gas at the beginning of the reaction, we successfully obtained nanorods with different orientations on the substrate. The Raman spectrum and cathodoluminescence spectrum of the AlN nanorods at room temperature reveal the existence of oxygen-related defects in the nanorods.

Original languageEnglish
JournalNanotechnology
Volume17
Issue number11
DOIs
Publication statusPublished - 2006 May 19

Fingerprint

Nanotubes
Aluminum nitride
Nanorods
Chemical vapor deposition
Growth
Temperature
Cathodoluminescence
Substrates
Buffer layers
aluminum nitride
Raman scattering
Buffers
Gases
Flow rate
Oxygen
Defects
Catalysts

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Controlled growth of aluminium nitride nanorod arrays via chemical vapour deposition. / Yang, Jian; Liu, Ting Wei; Hsu, Chi Wei; Chen, Li Chyong; Chen, Kuei Hsien; Chen, Chia Chun.

In: Nanotechnology, Vol. 17, No. 11, 19.05.2006.

Research output: Contribution to journalArticle

Yang, Jian ; Liu, Ting Wei ; Hsu, Chi Wei ; Chen, Li Chyong ; Chen, Kuei Hsien ; Chen, Chia Chun. / Controlled growth of aluminium nitride nanorod arrays via chemical vapour deposition. In: Nanotechnology. 2006 ; Vol. 17, No. 11.
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