Abstract
In this paper, a novel ballistic-injection AND-type (BiAND) split gate flash memory, with a trench select gate and buried n+ source is proposed. The ballistic source side injection (BSSI) programming mechanism is performed and realized in a contactless AND array, which features high programming efficiency, 10-3-10-4 and small cell size of 5F2. In addition, both the programming speed and read current is enhanced by the shared select gate structure. The BiAND flash memory is thus promising for low-voltage, high efficient, fast speed, scalable and high reliability non-volatile memory applications.
Original language | English |
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Pages (from-to) | 674-679 |
Number of pages | 6 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 45 |
Issue number | 2 A |
DOIs | |
Publication status | Published - 2006 Feb 8 |
Externally published | Yes |
Keywords
- AND memory
- Ballistic
- Flash memory
- Non-volNarkatile memory
- Split gate flash
ASJC Scopus subject areas
- General Engineering
- General Physics and Astronomy