Comparison of electrical and reliability characteristics of different 14 Å oxynitride gate dielectrics

Tung Ming Pan; Hsiu Shan Lin; Main Gwo Chen; Chuan Hsi Liu; Yih Jau Chang

doi:10.1109/LED.2002.1015223

Comparison of electrical and reliability characteristics of different 14 Å oxynitride gate dielectrics

Tung Ming Pan^*
, Hsiu Shan Lin
, Main Gwo Chen
, Chuan Hsi Liu
, Yih Jau Chang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

A comparison of RTNO, N₂O and N₂O-ISSG ultrathin oxynitride gate dielectrics fabricated by combining a remote plasma nitridation (RPN) treatment with equal physical oxide thickness of 14 Å is explored. The N₂O-ISSG oxynitride gate dielectric film demonstrates good interface properties, higher mobility and excellent reliability. This film by RPN treatment is thus attractive as the gate dielectric for future ultra-large scale integration (ULSI) devices.

Original language	English
Pages (from-to)	416-418
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	23
Issue number	7
DOIs	https://doi.org/10.1109/LED.2002.1015223
Publication status	Published - 2002 Jul
Externally published	Yes

Keywords

NO
NO-ISSG
Oxynitride
RPN
RTNO
Ultrathin

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/LED.2002.1015223

Cite this

@article{e7ee3465e1f54938992ce3fd9cd9e595,

title = "Comparison of electrical and reliability characteristics of different 14 {\AA} oxynitride gate dielectrics",

abstract = "A comparison of RTNO, N2O and N2O-ISSG ultrathin oxynitride gate dielectrics fabricated by combining a remote plasma nitridation (RPN) treatment with equal physical oxide thickness of 14 {\AA} is explored. The N2O-ISSG oxynitride gate dielectric film demonstrates good interface properties, higher mobility and excellent reliability. This film by RPN treatment is thus attractive as the gate dielectric for future ultra-large scale integration (ULSI) devices.",

keywords = "NO, NO-ISSG, Oxynitride, RPN, RTNO, Ultrathin",

author = "Pan, \{Tung Ming\} and Lin, \{Hsiu Shan\} and Chen, \{Main Gwo\} and Liu, \{Chuan Hsi\} and Chang, \{Yih Jau\}",

year = "2002",

month = jul,

doi = "10.1109/LED.2002.1015223",

language = "English",

volume = "23",

pages = "416--418",

journal = "IEEE Electron Device Letters",

issn = "0741-3106",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "7",

}

TY - JOUR

T1 - Comparison of electrical and reliability characteristics of different 14 Å oxynitride gate dielectrics

AU - Pan, Tung Ming

AU - Lin, Hsiu Shan

AU - Chen, Main Gwo

AU - Liu, Chuan Hsi

AU - Chang, Yih Jau

PY - 2002/7

Y1 - 2002/7

N2 - A comparison of RTNO, N2O and N2O-ISSG ultrathin oxynitride gate dielectrics fabricated by combining a remote plasma nitridation (RPN) treatment with equal physical oxide thickness of 14 Å is explored. The N2O-ISSG oxynitride gate dielectric film demonstrates good interface properties, higher mobility and excellent reliability. This film by RPN treatment is thus attractive as the gate dielectric for future ultra-large scale integration (ULSI) devices.

AB - A comparison of RTNO, N2O and N2O-ISSG ultrathin oxynitride gate dielectrics fabricated by combining a remote plasma nitridation (RPN) treatment with equal physical oxide thickness of 14 Å is explored. The N2O-ISSG oxynitride gate dielectric film demonstrates good interface properties, higher mobility and excellent reliability. This film by RPN treatment is thus attractive as the gate dielectric for future ultra-large scale integration (ULSI) devices.

KW - NO

KW - NO-ISSG

KW - Oxynitride

KW - RPN

KW - RTNO

KW - Ultrathin

UR - https://www.scopus.com/pages/publications/0036646346

UR - https://www.scopus.com/pages/publications/0036646346#tab=citedBy

U2 - 10.1109/LED.2002.1015223

DO - 10.1109/LED.2002.1015223

M3 - Article

AN - SCOPUS:0036646346

SN - 0741-3106

VL - 23

SP - 416

EP - 418

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 7

ER -

Comparison of electrical and reliability characteristics of different 14 Å oxynitride gate dielectrics

Abstract

Keywords

ASJC Scopus subject areas

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