Characteristics of low-resistivity aluminum-doped zinc oxide films deposited at room temperature by off-axis radio-frequency sputtering on flexible plastic substrates

Li Min Wang*, Chih Yi Wang, Ciao Ren Jheng, Syu Jhan Wu, Chen Kai Sai, Ya Ju Lee, Ching Yu Chiang, Bor Yuan Shew

*Corresponding author for this work

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