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Characteristics of low-resistivity aluminum-doped zinc oxide films deposited at room temperature by off-axis radio-frequency sputtering on flexible plastic substrates

  • Li Min Wang*
  • , Chih Yi Wang
  • , Ciao Ren Jheng
  • , Syu Jhan Wu
  • , Chen Kai Sai
  • , Ya Ju Lee
  • , Ching Yu Chiang
  • , Bor Yuan Shew
  • *Corresponding author for this work

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