Characteristics of high-Tc josephson junction fabricated by focused ION beam and ION damage

Chiu Hsien Wu, Wei Cheng Kuo, Yu Te Chou, Jau Han Chen, Hong Chang Yang

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    1 Citation (Scopus)

    Abstract

    A high-Tc Josephson junction and superconducting quantum interference devices (SQUIDs) were fabricated by focused ion beam (FIB) milling and 150 keV oxygen ion implantation. A single layer gold mask with a small aperture of 28-73 nm defined by direct milling with FIB, was used. The voltage versus current characteristics of high-Tc YBa2Cu 3O7-x Josephson junctions were measured under microwaves. Shapiro steps were observed in the single junction. The voltage versus current and voltage versus magnetic field characteristics of a SQUID were measured.

    Original languageEnglish
    Article number5153032
    Pages (from-to)210-213
    Number of pages4
    JournalIEEE Transactions on Applied Superconductivity
    Volume19
    Issue number3
    DOIs
    Publication statusPublished - 2009 Jun 1

    Keywords

    • Focused ion beam
    • Ion implantation
    • Josephson junction
    • SQUID

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering

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