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Channel modification engineering by plasma processing in tin-oxide thin film transistor: Experimental results and first-principles calculation

  • Y. C. Chiu
  • , P. C. Chen
  • , S. L. Chang
  • , Z. W. Zheng
  • , C. H. Cheng
  • , G. L. Liou
  • , H. L. Kao
  • , Y. H. Wu
  • , C. Y. Chang

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