Buried-heterostructure mid-infrared quantum cascade lasers fabricated by nonselective regrowth and chemical polishing

C. C. Chang; J. D. Kirch; P. Buelow; C. Boyle; T. F. Kuech; D. Lindberg; T. Earles; D. Botez; L. J. Mawst

doi:10.1049/el.2015.1094

Buried-heterostructure mid-infrared quantum cascade lasers fabricated by nonselective regrowth and chemical polishing

C. C. Chang, J. D. Kirch, P. Buelow, C. Boyle, T. F. Kuech, D. Lindberg, T. Earles, D. Botez, L. J. Mawst^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A novel fabrication method of buried-heterostructure (BH) midinfrared quantum cascade lasers (QCLs) by using non-selective regrowth of iron-doped indium phosphide (InP) (Fe:InP), around deeply etched laser ridges, via metal-organic chemical vapour deposition (MOCVD) and planarisation via chemical polishing is reported. Owing to better heat dissipation, the fabricated 4.75 μm emitting QCLs exhibit about three-fold enhancement in maximum output power under continuous-wave operation at room temperature (T = 20°C) compared with that from lasers without the regrown InP. The demonstrated fabrication method provides a more flexible route to realising BH QCLs by removing strict requirements on the etched-ridge sidewall profile, as well as on the physical dimensions of the dielectric mask for the regrowth via MOCVD. The method can be further employed for making large-emitting aperture, closely packed arrays of QCLs, with planarised geometry, for coherent-power scaling.

Original language	English
Pages (from-to)	1098-1100
Number of pages	3
Journal	Electronics Letters
Volume	51
Issue number	14
DOIs	https://doi.org/10.1049/el.2015.1094
Publication status	Published - 2015 Jul 9
Externally published	Yes

ASJC Scopus subject areas

Electrical and Electronic Engineering

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title = "Buried-heterostructure mid-infrared quantum cascade lasers fabricated by nonselective regrowth and chemical polishing",

abstract = "A novel fabrication method of buried-heterostructure (BH) midinfrared quantum cascade lasers (QCLs) by using non-selective regrowth of iron-doped indium phosphide (InP) (Fe:InP), around deeply etched laser ridges, via metal-organic chemical vapour deposition (MOCVD) and planarisation via chemical polishing is reported. Owing to better heat dissipation, the fabricated 4.75 μm emitting QCLs exhibit about three-fold enhancement in maximum output power under continuous-wave operation at room temperature (T = 20°C) compared with that from lasers without the regrown InP. The demonstrated fabrication method provides a more flexible route to realising BH QCLs by removing strict requirements on the etched-ridge sidewall profile, as well as on the physical dimensions of the dielectric mask for the regrowth via MOCVD. The method can be further employed for making large-emitting aperture, closely packed arrays of QCLs, with planarised geometry, for coherent-power scaling.",

author = "Chang, {C. C.} and Kirch, {J. D.} and P. Buelow and C. Boyle and Kuech, {T. F.} and D. Lindberg and T. Earles and D. Botez and Mawst, {L. J.}",

note = "Publisher Copyright: {\textcopyright} The Institution of Engineering and Technology 2015.",

year = "2015",

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doi = "10.1049/el.2015.1094",

language = "English",

volume = "51",

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AU - Chang, C. C.

AU - Kirch, J. D.

AU - Buelow, P.

AU - Boyle, C.

AU - Kuech, T. F.

AU - Lindberg, D.

AU - Earles, T.

AU - Botez, D.

AU - Mawst, L. J.

PY - 2015/7/9

Y1 - 2015/7/9

N2 - A novel fabrication method of buried-heterostructure (BH) midinfrared quantum cascade lasers (QCLs) by using non-selective regrowth of iron-doped indium phosphide (InP) (Fe:InP), around deeply etched laser ridges, via metal-organic chemical vapour deposition (MOCVD) and planarisation via chemical polishing is reported. Owing to better heat dissipation, the fabricated 4.75 μm emitting QCLs exhibit about three-fold enhancement in maximum output power under continuous-wave operation at room temperature (T = 20°C) compared with that from lasers without the regrown InP. The demonstrated fabrication method provides a more flexible route to realising BH QCLs by removing strict requirements on the etched-ridge sidewall profile, as well as on the physical dimensions of the dielectric mask for the regrowth via MOCVD. The method can be further employed for making large-emitting aperture, closely packed arrays of QCLs, with planarised geometry, for coherent-power scaling.

AB - A novel fabrication method of buried-heterostructure (BH) midinfrared quantum cascade lasers (QCLs) by using non-selective regrowth of iron-doped indium phosphide (InP) (Fe:InP), around deeply etched laser ridges, via metal-organic chemical vapour deposition (MOCVD) and planarisation via chemical polishing is reported. Owing to better heat dissipation, the fabricated 4.75 μm emitting QCLs exhibit about three-fold enhancement in maximum output power under continuous-wave operation at room temperature (T = 20°C) compared with that from lasers without the regrown InP. The demonstrated fabrication method provides a more flexible route to realising BH QCLs by removing strict requirements on the etched-ridge sidewall profile, as well as on the physical dimensions of the dielectric mask for the regrowth via MOCVD. The method can be further employed for making large-emitting aperture, closely packed arrays of QCLs, with planarised geometry, for coherent-power scaling.

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Buried-heterostructure mid-infrared quantum cascade lasers fabricated by nonselective regrowth and chemical polishing

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