TY - GEN
T1 - Batch fabrication of micro preconcentrator with thin film microheater using Tollen's reaction
AU - Lin, Y. S.
AU - Kuo, C. Y.
AU - Tian, W. C.
AU - Wu, T. H.
AU - Sheen, H. J.
AU - Kuo, H. Y.
AU - Lu, C. J.
PY - 2013
Y1 - 2013
N2 - A batch fabrication with simple micromachined process based on one photomask and the microfluidic laminar flow patterning technique is developed for a novel micropreconcentrator (μPCT) used in a micro gas chromatograph (μGC). Silver deposition using Tollens' reactions in microfludic channels provides a higher deposition rate and easier microfabrication compared to conventional micromachined technologies for thick metal microstructures (> 200 μm). An amorphous and porous carbon film that functions as an adsorbent is grown on microheaters inside the microchannel. The μPCT can be heated to >300°C rapidly by applying a constant electrical power of 5 W with a heating rate of 60°C/s. Four volatile organic compounds (VOCs), acetone, benzene, toluene, and xylene, are collected through the proposed novel μPCTs and separated successfully using a 17-m-long gas chromatography (GC) column. Compared with our previous work, the more uniform temperature distribution, more efficient heating rate and smaller peak widths at half height (PWHH) are obtained.
AB - A batch fabrication with simple micromachined process based on one photomask and the microfluidic laminar flow patterning technique is developed for a novel micropreconcentrator (μPCT) used in a micro gas chromatograph (μGC). Silver deposition using Tollens' reactions in microfludic channels provides a higher deposition rate and easier microfabrication compared to conventional micromachined technologies for thick metal microstructures (> 200 μm). An amorphous and porous carbon film that functions as an adsorbent is grown on microheaters inside the microchannel. The μPCT can be heated to >300°C rapidly by applying a constant electrical power of 5 W with a heating rate of 60°C/s. Four volatile organic compounds (VOCs), acetone, benzene, toluene, and xylene, are collected through the proposed novel μPCTs and separated successfully using a 17-m-long gas chromatography (GC) column. Compared with our previous work, the more uniform temperature distribution, more efficient heating rate and smaller peak widths at half height (PWHH) are obtained.
KW - Micro preconcentrator
KW - Tollens' reaction
KW - gas chromatography
KW - laminar flow patterning
UR - http://www.scopus.com/inward/record.url?scp=84891722237&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891722237&partnerID=8YFLogxK
U2 - 10.1109/Transducers.2013.6627195
DO - 10.1109/Transducers.2013.6627195
M3 - Conference contribution
AN - SCOPUS:84891722237
SN - 9781467359818
T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
SP - 2025
EP - 2028
BT - 2013 Transducers and Eurosensors XXVII
T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Y2 - 16 June 2013 through 20 June 2013
ER -