Batch fabrication of micro preconcentrator with thin film microheater using Tollen's reaction

Y. S. Lin, C. Y. Kuo, W. C. Tian, T. H. Wu, H. J. Sheen, H. Y. Kuo, Chia-Jung Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

A batch fabrication with simple micromachined process based on one photomask and the microfluidic laminar flow patterning technique is developed for a novel micropreconcentrator (μPCT) used in a micro gas chromatograph (μGC). Silver deposition using Tollens' reactions in microfludic channels provides a higher deposition rate and easier microfabrication compared to conventional micromachined technologies for thick metal microstructures (> 200 μm). An amorphous and porous carbon film that functions as an adsorbent is grown on microheaters inside the microchannel. The μPCT can be heated to >300°C rapidly by applying a constant electrical power of 5 W with a heating rate of 60°C/s. Four volatile organic compounds (VOCs), acetone, benzene, toluene, and xylene, are collected through the proposed novel μPCTs and separated successfully using a 17-m-long gas chromatography (GC) column. Compared with our previous work, the more uniform temperature distribution, more efficient heating rate and smaller peak widths at half height (PWHH) are obtained.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages2025-2028
Number of pages4
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 2013 Jun 162013 Jun 20

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period13/6/1613/6/20

Fingerprint

Heating rate
Fabrication
Thin films
Photomasks
Carbon films
Microfabrication
Xylene
Microchannels
Deposition rates
Volatile organic compounds
Laminar flow
Microfluidics
Acetone
Gas chromatography
Adsorbents
Toluene
Benzene
Silver
Temperature distribution
Microstructure

Keywords

  • Micro preconcentrator
  • Tollens' reaction
  • gas chromatography
  • laminar flow patterning

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Lin, Y. S., Kuo, C. Y., Tian, W. C., Wu, T. H., Sheen, H. J., Kuo, H. Y., & Lu, C-J. (2013). Batch fabrication of micro preconcentrator with thin film microheater using Tollen's reaction. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 2025-2028). [6627195] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627195

Batch fabrication of micro preconcentrator with thin film microheater using Tollen's reaction. / Lin, Y. S.; Kuo, C. Y.; Tian, W. C.; Wu, T. H.; Sheen, H. J.; Kuo, H. Y.; Lu, Chia-Jung.

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2025-2028 6627195 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lin, YS, Kuo, CY, Tian, WC, Wu, TH, Sheen, HJ, Kuo, HY & Lu, C-J 2013, Batch fabrication of micro preconcentrator with thin film microheater using Tollen's reaction. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6627195, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp. 2025-2028, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 13/6/16. https://doi.org/10.1109/Transducers.2013.6627195
Lin YS, Kuo CY, Tian WC, Wu TH, Sheen HJ, Kuo HY et al. Batch fabrication of micro preconcentrator with thin film microheater using Tollen's reaction. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2025-2028. 6627195. (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627195
Lin, Y. S. ; Kuo, C. Y. ; Tian, W. C. ; Wu, T. H. ; Sheen, H. J. ; Kuo, H. Y. ; Lu, Chia-Jung. / Batch fabrication of micro preconcentrator with thin film microheater using Tollen's reaction. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. pp. 2025-2028 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).
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