Annealing effects and structural evolution of Si/Cu(1 1 1) ultrathin films

J. S. Tsay, A. B. Yang, C. N. Wu, F. S. Shiu

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The surface structure and compositions of the Si/Cu(1 1 1) system have been systematically investigated. As Si atoms are deposited on a Cu(1 1 1) surface, a sqrt(3) × sqrt(3) R 30 ° structure is observed for up to 2 monolayers. The surface structure changes to be 1 × 1 for thicker films. As the annealing temperature increases, most Si atoms diffuse into the Cu(1 1 1) substrate. The residual Si atoms in the top layer form an ordered surface alloy that lies on a Cu-rich surface. A structural phase diagram is successfully established for Si/Cu(1 1 1) films thinner than 5 monolayers at temperatures up to 600 K. The phase diagram can be divided into three regions. In region I for low coverage or at high temperatures, the films exhibit sqrt(3) × sqrt(3) R 30 ° structure. In regions II and III, 1 × 1 and disordered surface structure are resolved, respectively.

Original languageEnglish
Pages (from-to)4265-4269
Number of pages5
JournalSurface Science
Volume601
Issue number18
DOIs
Publication statusPublished - 2007 Sep 15

Fingerprint

Ultrathin films
Surface structure
Annealing
annealing
Atoms
Phase diagrams
Monolayers
phase diagrams
Thick films
Temperature
atoms
Thin films
thick films
Substrates
temperature
thin films

Keywords

  • Auger electron spectroscopy
  • Copper
  • Low-energy electron diffraction
  • Metal-semiconductor interfaces
  • Silicides
  • Silicon
  • Surface structure

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Annealing effects and structural evolution of Si/Cu(1 1 1) ultrathin films. / Tsay, J. S.; Yang, A. B.; Wu, C. N.; Shiu, F. S.

In: Surface Science, Vol. 601, No. 18, 15.09.2007, p. 4265-4269.

Research output: Contribution to journalArticle

Tsay, J. S. ; Yang, A. B. ; Wu, C. N. ; Shiu, F. S. / Annealing effects and structural evolution of Si/Cu(1 1 1) ultrathin films. In: Surface Science. 2007 ; Vol. 601, No. 18. pp. 4265-4269.
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