Analysis of Si:C on relaxed SiGe by reciprocal space mapping for MOSFET applications

M. H. Lee, P. G. Chen, S. T. Chang

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Analysis of Si:C on relaxed SiGe by reciprocal space mapping for MOSFET applications'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds