An integrated micro electro mechanical system–based silicon wet etching process and nano carbon materials used for improving micro direct methanol fuel cells performance

C. R. Yang, P. C. Fu, C. Cheng, M. J. Huang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

This study integrates “TMAH wet etching” “photo-assisted electrochemical etching’, “PtRu binary metal chemical plating”, and “methanol modification” techniques to develop a micro direct methanol fuel cell. The battery electrode plate is made into microchannel + porous silicon (PS) and microchannel + through-silicon via (TSV) plate electrodes using a silicon wafer as the substrate. When the anode and cathode use a PS electrode and TSV electrode, respectively, the maximum open-circuit voltage is 0.4 V, which is 1.5 times the cell using the PS electrode and 6.7 times the cell using the TSV electrode. The PtRu binary metal is uniformly coated on the surface of a graphene and carbon nanotube to form a compound catalyst layer (PtRu/G-CNT), where the Pt and Ru contents are 34.1 wt% and 2.6 wt%, respectively. In the half-cell test, the oxidation current peak of PtRu/G-CNT is 5 mA/cm2, which is 2.02 times and 2.4 times that of Pt/G-CNT and PtRu/G, respectively. When the fuel is mixed with 0.1% surfactant of sodium dihexyl sulfosuccinate, the maximum power density is 0.336 MW/cm2, and the maximum open-circuit voltage is 0.48 V, which are 1.4 times and 1.2 times the case without a surfactant, respectively.

Original languageEnglish
Article number100696
JournalMaterials Today Energy
Volume20
DOIs
Publication statusPublished - 2021 Jun

Keywords

  • Binary metal
  • Direct methanol fuel cell
  • Porous silicon
  • Surfactant
  • Through-silicon via

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Materials Science (miscellaneous)
  • Nuclear Energy and Engineering
  • Fuel Technology
  • Energy Engineering and Power Technology

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