Abstract
For dynamic motion systems, this paper presents a design for an integrated accelerometer that combines salient features of a MEMS capacitive accelerometer and a piezoelectric accelerometer. The piezoelectric accelerometer has a wide frequency range for measuring dynamic acceleration but is unable to sense static and quasi-static acceleration. On the other hand, the MEMS capacitive accelerometer is dc coupled and hence suitable for measuring low-frequency motion but suffers from a limited bandwidth and a low signal-to-noise ratio. The proposed accelerometer fuses these two accelerometers, being able to measure static and quasi-static acceleration and also having measurement of a wide frequency range. Experimental studies have been conducted to show feasibility and effectiveness of the proposed accelerometer.
Original language | English |
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Pages (from-to) | 471-475 |
Number of pages | 5 |
Journal | Measurement: Journal of the International Measurement Confederation |
Volume | 125 |
DOIs | |
Publication status | Published - 2018 Sept |
Keywords
- Acceleration
- Capacitive accelerometer
- Motion system
- Piezoelectric accelerometer
- Sensor fusion
ASJC Scopus subject areas
- Instrumentation
- Electrical and Electronic Engineering