An integrated accelerometer for dynamic motion systems

Yu Sheng Lu*, Hsuan Wen Wang, Sheng Hao Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)


For dynamic motion systems, this paper presents a design for an integrated accelerometer that combines salient features of a MEMS capacitive accelerometer and a piezoelectric accelerometer. The piezoelectric accelerometer has a wide frequency range for measuring dynamic acceleration but is unable to sense static and quasi-static acceleration. On the other hand, the MEMS capacitive accelerometer is dc coupled and hence suitable for measuring low-frequency motion but suffers from a limited bandwidth and a low signal-to-noise ratio. The proposed accelerometer fuses these two accelerometers, being able to measure static and quasi-static acceleration and also having measurement of a wide frequency range. Experimental studies have been conducted to show feasibility and effectiveness of the proposed accelerometer.

Original languageEnglish
Pages (from-to)471-475
Number of pages5
JournalMeasurement: Journal of the International Measurement Confederation
Publication statusPublished - 2018 Sept


  • Acceleration
  • Capacitive accelerometer
  • Motion system
  • Piezoelectric accelerometer
  • Sensor fusion

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering


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