An integrated accelerometer for dynamic motion systems

Yu Sheng Lu, Hsuan Wen Wang, Sheng Hao Liu

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

For dynamic motion systems, this paper presents a design for an integrated accelerometer that combines salient features of a MEMS capacitive accelerometer and a piezoelectric accelerometer. The piezoelectric accelerometer has a wide frequency range for measuring dynamic acceleration but is unable to sense static and quasi-static acceleration. On the other hand, the MEMS capacitive accelerometer is dc coupled and hence suitable for measuring low-frequency motion but suffers from a limited bandwidth and a low signal-to-noise ratio. The proposed accelerometer fuses these two accelerometers, being able to measure static and quasi-static acceleration and also having measurement of a wide frequency range. Experimental studies have been conducted to show feasibility and effectiveness of the proposed accelerometer.

Original languageEnglish
Pages (from-to)471-475
Number of pages5
JournalMeasurement: Journal of the International Measurement Confederation
Volume125
DOIs
Publication statusPublished - 2018 Sep 1

Fingerprint

Accelerometer
accelerometers
Accelerometers
Motion
Micro-electro-mechanical Systems
microelectromechanical systems
MEMS
frequency ranges
fuses
Electric fuses
Range of data
Low Frequency
Experimental Study
Signal to noise ratio
signal to noise ratios
Bandwidth
low frequencies
bandwidth

Keywords

  • Acceleration
  • Capacitive accelerometer
  • Motion system
  • Piezoelectric accelerometer
  • Sensor fusion

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

An integrated accelerometer for dynamic motion systems. / Lu, Yu Sheng; Wang, Hsuan Wen; Liu, Sheng Hao.

In: Measurement: Journal of the International Measurement Confederation, Vol. 125, 01.09.2018, p. 471-475.

Research output: Contribution to journalArticle

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AB - For dynamic motion systems, this paper presents a design for an integrated accelerometer that combines salient features of a MEMS capacitive accelerometer and a piezoelectric accelerometer. The piezoelectric accelerometer has a wide frequency range for measuring dynamic acceleration but is unable to sense static and quasi-static acceleration. On the other hand, the MEMS capacitive accelerometer is dc coupled and hence suitable for measuring low-frequency motion but suffers from a limited bandwidth and a low signal-to-noise ratio. The proposed accelerometer fuses these two accelerometers, being able to measure static and quasi-static acceleration and also having measurement of a wide frequency range. Experimental studies have been conducted to show feasibility and effectiveness of the proposed accelerometer.

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