Amorphous layers by electron beam evaporator deposition for hetero-junction with intrinsic thin layer solar cells applications

Sally Liu, Zhi Yu Chen, Shu Tong Chang, Min Hung Lee

Research output: Contribution to journalArticle


A low-cost process with electron beam evaporator deposition for amorphous layers was demonstrated in hetero-junction with intrinsic thin layer (HIT) solar cell. The cleaning process with saw damage removal procedure and the annealing temperature are also discussed in this work. The open-circuit voltage (Voc) and short-circuit current density (Jsc) were obtained as 285 mV and 2.9 mA/cm2, respectively, with 5 min saw damage removal and 450°C forming gas annealing. Therefore, the low-cost process with the electron beam evaporator deposition could possibly fabricate the HIT solar cell and be a candidate for future higher performance photovoltaic device with optimisation process condition.

Original languageEnglish
Pages (from-to)485-491
Number of pages7
JournalInternational Journal of Nanotechnology
Issue number7
Publication statusPublished - 2016 Jan 1



  • Crystalline silicon
  • Electron beam evaporation
  • HIT
  • Hetero-junction with intrinsic thin layer
  • Heterojunction
  • Photovoltaic

ASJC Scopus subject areas

  • Bioengineering
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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