Amorphous layers by electron beam evaporator deposition for hetero-junction with intrinsic thin layer solar cells applications

Sally Liu, Zhi Yu Chen, Shu Tong Chang, Min Hung Lee

    Research output: Contribution to journalArticle

    Abstract

    A low-cost process with electron beam evaporator deposition for amorphous layers was demonstrated in hetero-junction with intrinsic thin layer (HIT) solar cell. The cleaning process with saw damage removal procedure and the annealing temperature are also discussed in this work. The open-circuit voltage (Voc) and short-circuit current density (Jsc) were obtained as 285 mV and 2.9 mA/cm2, respectively, with 5 min saw damage removal and 450°C forming gas annealing. Therefore, the low-cost process with the electron beam evaporator deposition could possibly fabricate the HIT solar cell and be a candidate for future higher performance photovoltaic device with optimisation process condition.

    Original languageEnglish
    Pages (from-to)485-491
    Number of pages7
    JournalInternational Journal of Nanotechnology
    Volume13
    Issue number7
    DOIs
    Publication statusPublished - 2016

    Fingerprint

    evaporators
    Evaporators
    Electron beams
    Solar cells
    solar cells
    electron beams
    Annealing
    damage
    annealing
    Open circuit voltage
    short circuit currents
    open circuit voltage
    Short circuit currents
    cleaning
    Costs
    Cleaning
    Current density
    Gases
    current density
    optimization

    Keywords

    • Crystalline silicon
    • Electron beam evaporation
    • Hetero-junction with intrinsic thin layer
    • Heterojunction
    • HIT
    • Photovoltaic

    ASJC Scopus subject areas

    • Bioengineering
    • Condensed Matter Physics
    • Materials Chemistry
    • Electrical and Electronic Engineering

    Cite this

    Amorphous layers by electron beam evaporator deposition for hetero-junction with intrinsic thin layer solar cells applications. / Liu, Sally; Chen, Zhi Yu; Chang, Shu Tong; Lee, Min Hung.

    In: International Journal of Nanotechnology, Vol. 13, No. 7, 2016, p. 485-491.

    Research output: Contribution to journalArticle

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