Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases

Yu Yun Chen, Liang Yu Yen, Jin Cherng Hsu*, Huang Lu Chen, Paul W. Wang, Hsiang Lin Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Physics & Astronomy