Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases

Yu Yun Chen; Liang Yu Yen; Jin Cherng Hsu; Huang Lu Chen; Paul W. Wang; Hsiang Lin Liu

doi:10.1007/s10043-011-0057-4

Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases

Yu Yun Chen, Liang Yu Yen, Jin Cherng Hsu^*, Huang Lu Chen, Paul W. Wang, Hsiang Lin Liu

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Al₂O₃ thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O₂ or SF₆, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF₆ was used.

Original language	English
Pages (from-to)	293-295
Number of pages	3
Journal	Optical Review
Volume	18
Issue number	3
DOIs	https://doi.org/10.1007/s10043-011-0057-4
Publication status	Published - 2011 May

Keywords

AlO
SF
ion-assisted deposition
optical properties
packing density

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1007/s10043-011-0057-4

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title = "Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases",

abstract = "Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF6 was used.",

keywords = "AlO, SF, ion-assisted deposition, optical properties, packing density",

author = "Chen, {Yu Yun} and Yen, {Liang Yu} and Hsu, {Jin Cherng} and Chen, {Huang Lu} and Wang, {Paul W.} and Liu, {Hsiang Lin}",

year = "2011",

month = may,

doi = "10.1007/s10043-011-0057-4",

language = "English",

volume = "18",

pages = "293--295",

journal = "Optical Review",

issn = "1340-6000",

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T1 - Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases

AU - Chen, Yu Yun

AU - Yen, Liang Yu

AU - Hsu, Jin Cherng

AU - Chen, Huang Lu

AU - Wang, Paul W.

AU - Liu, Hsiang Lin

PY - 2011/5

Y1 - 2011/5

N2 - Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF6 was used.

AB - Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF6 was used.

KW - AlO

KW - SF

KW - ion-assisted deposition

KW - optical properties

KW - packing density

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U2 - 10.1007/s10043-011-0057-4

DO - 10.1007/s10043-011-0057-4

M3 - Article

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JO - Optical Review

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ER -

Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases

Abstract

Keywords

ASJC Scopus subject areas

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