Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF6 was used.
- ion-assisted deposition
- optical properties
- packing density
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics