Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases

Yu Yun Chen, Liang Yu Yen, Jin Cherng Hsu, Huang Lu Chen, Paul W. Wang, Hsiang Lin Liu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF6 was used.

Original languageEnglish
Pages (from-to)293-295
Number of pages3
JournalOptical Review
Volume18
Issue number3
DOIs
Publication statusPublished - 2011 May 1

Fingerprint

sulfur hexafluoride
packing density
extinction
aluminum oxides
evaporation
electron beams
room temperature
oxygen
coefficients
thin films
gases
ions

Keywords

  • AlO
  • SF
  • ion-assisted deposition
  • optical properties
  • packing density

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases. / Chen, Yu Yun; Yen, Liang Yu; Hsu, Jin Cherng; Chen, Huang Lu; Wang, Paul W.; Liu, Hsiang Lin.

In: Optical Review, Vol. 18, No. 3, 01.05.2011, p. 293-295.

Research output: Contribution to journalArticle

Chen, Yu Yun ; Yen, Liang Yu ; Hsu, Jin Cherng ; Chen, Huang Lu ; Wang, Paul W. ; Liu, Hsiang Lin. / Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases. In: Optical Review. 2011 ; Vol. 18, No. 3. pp. 293-295.
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