A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor

C. H. Cheng, C. C. Huang, H. H. Hsu, P. C. Chen, K. C. Chiang, Albert Chin, F. S. Yeh

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

In this article, we investigate the frequency-dependent voltage nonlinearity effect of high-κ Ni/SrTiO3/TaN and TaN/SrTiO 3/TaN radio-frequency (rf) metal-insulator-metal (MIM) capacitors by electrical and thermal stresses. The experimental results demonstrated that the MIM-related capacitance properties, dependence of voltage and frequency, are not only affected by intrinsic dielectric properties but also shared by extrinsic effect, which possibly originated from the oxygen vacancies or electrode polarization. The high work-function Ni electrode can prevent the frequency-dependent voltage coefficient of capacitance characteristics from deterioration under the high temperature or continued voltage-stressing environments.

Original languageEnglish
Pages (from-to)H436-H439
JournalElectrochemical and Solid-State Letters
Volume13
Issue number12
DOIs
Publication statusPublished - 2010 Oct 29

Fingerprint

capacitors
radio frequencies
Capacitors
Metals
nonlinearity
Electric potential
electric potential
metals
Capacitance
capacitance
insulators
Electrodes
electrodes
Oxygen vacancies
thermal stresses
deterioration
Thermal stress
Dielectric properties
Deterioration
dielectric properties

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

Cheng, C. H., Huang, C. C., Hsu, H. H., Chen, P. C., Chiang, K. C., Chin, A., & Yeh, F. S. (2010). A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor. Electrochemical and Solid-State Letters, 13(12), H436-H439. https://doi.org/10.1149/1.3491490

A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor. / Cheng, C. H.; Huang, C. C.; Hsu, H. H.; Chen, P. C.; Chiang, K. C.; Chin, Albert; Yeh, F. S.

In: Electrochemical and Solid-State Letters, Vol. 13, No. 12, 29.10.2010, p. H436-H439.

Research output: Contribution to journalArticle

Cheng, CH, Huang, CC, Hsu, HH, Chen, PC, Chiang, KC, Chin, A & Yeh, FS 2010, 'A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor', Electrochemical and Solid-State Letters, vol. 13, no. 12, pp. H436-H439. https://doi.org/10.1149/1.3491490
Cheng, C. H. ; Huang, C. C. ; Hsu, H. H. ; Chen, P. C. ; Chiang, K. C. ; Chin, Albert ; Yeh, F. S. / A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor. In: Electrochemical and Solid-State Letters. 2010 ; Vol. 13, No. 12. pp. H436-H439.
@article{420b17df0d744770baaa266fe791a725,
title = "A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor",
abstract = "In this article, we investigate the frequency-dependent voltage nonlinearity effect of high-κ Ni/SrTiO3/TaN and TaN/SrTiO 3/TaN radio-frequency (rf) metal-insulator-metal (MIM) capacitors by electrical and thermal stresses. The experimental results demonstrated that the MIM-related capacitance properties, dependence of voltage and frequency, are not only affected by intrinsic dielectric properties but also shared by extrinsic effect, which possibly originated from the oxygen vacancies or electrode polarization. The high work-function Ni electrode can prevent the frequency-dependent voltage coefficient of capacitance characteristics from deterioration under the high temperature or continued voltage-stressing environments.",
author = "Cheng, {C. H.} and Huang, {C. C.} and Hsu, {H. H.} and Chen, {P. C.} and Chiang, {K. C.} and Albert Chin and Yeh, {F. S.}",
year = "2010",
month = "10",
day = "29",
doi = "10.1149/1.3491490",
language = "English",
volume = "13",
pages = "H436--H439",
journal = "Electrochemical and Solid-State Letters",
issn = "1099-0062",
publisher = "Electrochemical Society, Inc.",
number = "12",

}

TY - JOUR

T1 - A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor

AU - Cheng, C. H.

AU - Huang, C. C.

AU - Hsu, H. H.

AU - Chen, P. C.

AU - Chiang, K. C.

AU - Chin, Albert

AU - Yeh, F. S.

PY - 2010/10/29

Y1 - 2010/10/29

N2 - In this article, we investigate the frequency-dependent voltage nonlinearity effect of high-κ Ni/SrTiO3/TaN and TaN/SrTiO 3/TaN radio-frequency (rf) metal-insulator-metal (MIM) capacitors by electrical and thermal stresses. The experimental results demonstrated that the MIM-related capacitance properties, dependence of voltage and frequency, are not only affected by intrinsic dielectric properties but also shared by extrinsic effect, which possibly originated from the oxygen vacancies or electrode polarization. The high work-function Ni electrode can prevent the frequency-dependent voltage coefficient of capacitance characteristics from deterioration under the high temperature or continued voltage-stressing environments.

AB - In this article, we investigate the frequency-dependent voltage nonlinearity effect of high-κ Ni/SrTiO3/TaN and TaN/SrTiO 3/TaN radio-frequency (rf) metal-insulator-metal (MIM) capacitors by electrical and thermal stresses. The experimental results demonstrated that the MIM-related capacitance properties, dependence of voltage and frequency, are not only affected by intrinsic dielectric properties but also shared by extrinsic effect, which possibly originated from the oxygen vacancies or electrode polarization. The high work-function Ni electrode can prevent the frequency-dependent voltage coefficient of capacitance characteristics from deterioration under the high temperature or continued voltage-stressing environments.

UR - http://www.scopus.com/inward/record.url?scp=77958505933&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77958505933&partnerID=8YFLogxK

U2 - 10.1149/1.3491490

DO - 10.1149/1.3491490

M3 - Article

AN - SCOPUS:77958505933

VL - 13

SP - H436-H439

JO - Electrochemical and Solid-State Letters

JF - Electrochemical and Solid-State Letters

SN - 1099-0062

IS - 12

ER -