A preconcentrator chip employing μ-SPME array coated with in-situ-synthesized carbon adsorbent film for VOCs analysis

Ming Yee Wong, Wei Rui Cheng, Mao Huang Liu, Wei Cheng Tian, Chia-Jung Lu

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

We report the design, fabrication, and evaluation of a μ-preconcentrator chip that utilizes an array of solid-phase microextraction (SPME) needles coated with in-situ-grown carbon adsorbent film. The structure of the SPME needle (diameter=100 μm, height=250 μm) array inside the sampling chamber was fabricated using a deep reactive-ion etching (DRIE) process to enhance the attachable surface area for adsorbent film. Heaters and temperature sensors were fabricated onto the back of a μ-preconcentrator chip using lithography patterning and a metal lift-off process. The devices were sealed by anodic bonding and diced prior to the application of the adsorbent film. An adsorbent precursor, cellulose was dissolved in water and dynamically coated onto the SPME needle array. The coated cellulose film was converted into a porous carbon film via pyrolysis at 600 °C in a N2 atmosphere. The surface area of the carbon adsorbent film was 308 m2/g, which is higher than that of a commercial adsorbent Carbopack X. A preconcentration factor as high as 13,637-fold was demonstrated using toluene. Eleven volatile organic compounds (VOCs) of different volatilities and functional groups were sampled and analyzed by GC-FID, and the desorption peak widths at half height were all less than 2.6 s after elution from a 15 m capillary GC column. There was no sign of performance degradation after continuous operation for 50 cycles in air.

Original languageEnglish
Pages (from-to)307-313
Number of pages7
JournalTalanta
Volume101
DOIs
Publication statusPublished - 2012 Nov 15

Fingerprint

Volatile Organic Compounds
Solid Phase Microextraction
Adsorbents
Needles
Carbon
Cellulose
Volatilization
Toluene
Atmosphere
Hermetic devices
Metals
Air
Cellulose films
Ions
Equipment and Supplies
Temperature
Water
Carbon films
Reactive ion etching
Temperature sensors

Keywords

  • Carbon adsorbent
  • Micro-GC
  • Preconcentrator
  • SPME
  • VOCs

ASJC Scopus subject areas

  • Analytical Chemistry

Cite this

A preconcentrator chip employing μ-SPME array coated with in-situ-synthesized carbon adsorbent film for VOCs analysis. / Wong, Ming Yee; Cheng, Wei Rui; Liu, Mao Huang; Tian, Wei Cheng; Lu, Chia-Jung.

In: Talanta, Vol. 101, 15.11.2012, p. 307-313.

Research output: Contribution to journalArticle

Wong, Ming Yee ; Cheng, Wei Rui ; Liu, Mao Huang ; Tian, Wei Cheng ; Lu, Chia-Jung. / A preconcentrator chip employing μ-SPME array coated with in-situ-synthesized carbon adsorbent film for VOCs analysis. In: Talanta. 2012 ; Vol. 101. pp. 307-313.
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