A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism

Sheng Chih Huang; Shao Kang Hung; Mei Yung Chen; Chih Hsien Lin; Li Chen Fu

doi:10.1109/IECON.2007.4460161

A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism

Sheng Chih Huang^*, Shao Kang Hung, Mei Yung Chen, Chih Hsien Lin, Li Chen Fu

^*Corresponding author for this work

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

In this paper, we present a novel mechanism and system implementation of six degree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3mm×3mm×4mm with a positioning resolution of±10μm, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.

Original language	English
Title of host publication	Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
Pages	822-827
Number of pages	6
DOIs	https://doi.org/10.1109/IECON.2007.4460161
Publication status	Published - 2007
Event	33rd Annual Conference of the IEEE Industrial Electronics Society, IECON - Taipei, Taiwan Duration: 2007 Nov 5 → 2007 Nov 8

Publication series

Name	IECON Proceedings (Industrial Electronics Conference)

Other

Other	33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
Country/Territory	Taiwan
City	Taipei
Period	2007/11/05 → 2007/11/08

Keywords

Hybrid magnetic and fluid mechanism
Positioner
Precision motion control

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/IECON.2007.4460161

Cite this

Huang, S. C., Hung, S. K., Chen, M. Y., Lin, C. H., & Fu, L. C. (2007). A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism. In Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON (pp. 822-827). Article 4460161 (IECON Proceedings (Industrial Electronics Conference)). https://doi.org/10.1109/IECON.2007.4460161

A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism. / Huang, Sheng Chih; Hung, Shao Kang; Chen, Mei Yung et al.
Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON. 2007. p. 822-827 4460161 (IECON Proceedings (Industrial Electronics Conference)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Huang, SC, Hung, SK, Chen, MY, Lin, CH & Fu, LC 2007, A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism. in Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON., 4460161, IECON Proceedings (Industrial Electronics Conference), pp. 822-827, 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON, Taipei, Taiwan, 2007/11/05. https://doi.org/10.1109/IECON.2007.4460161

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abstract = "In this paper, we present a novel mechanism and system implementation of six degree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3mm×3mm×4mm with a positioning resolution of±10μm, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.",

keywords = "Hybrid magnetic and fluid mechanism, Positioner, Precision motion control",

author = "Huang, {Sheng Chih} and Hung, {Shao Kang} and Chen, {Mei Yung} and Lin, {Chih Hsien} and Fu, {Li Chen}",

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AB - In this paper, we present a novel mechanism and system implementation of six degree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3mm×3mm×4mm with a positioning resolution of±10μm, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.

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A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism

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Keywords

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