A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism

Sheng Chih Huang, Shao Kang Hung, Mei Yung Chen, Chih Hsien Lin, Li Chen Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, we present a novel mechanism and system implementation of six degree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3mm×3mm×4mm with a positioning resolution of±10μm, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.

Original languageEnglish
Title of host publicationProceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
Pages822-827
Number of pages6
DOIs
Publication statusPublished - 2007 Dec 1
Event33rd Annual Conference of the IEEE Industrial Electronics Society, IECON - Taipei, Taiwan
Duration: 2007 Nov 52007 Nov 8

Publication series

NameIECON Proceedings (Industrial Electronics Conference)

Other

Other33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
CountryTaiwan
CityTaipei
Period07/11/507/11/8

Keywords

  • Hybrid magnetic and fluid mechanism
  • Positioner
  • Precision motion control

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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