A novel micropreconcentrator employing a laminar flow patterned heater for micro gas chromatography

W. C. Tian, T. H. Wu, C. J. Lu, W. R. Chen, H. J. Sheen

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

A simple micromachined process based on one photomask is developed for a novel micropreconcentrator (PCT) used in a micro gas chromatograph (GC). Unique thick silver heating microstructures with a high surface area for microheater of PCT are fabricated by combining the microfluidic laminar flow technique and the Tollens reaction within a microchannel. Silver deposition using this laminar flow patterning technique provides a higher deposition rate and easier microfabrication compared to conventional micromachined technologies for thick metal microstructures (>200 m). An amorphous and porous carbon film that functions as an adsorbent is grown on microheaters inside the microchannel. The PCT can be heated to >300 °C rapidly by applying a constant electrical power of 1 W with a heating rate of 10 °C s 1. Four volatile organic compounds, acetone, benzene, toluene and xylene, are collected through the proposed novel PCTs and separated successfully using a 17 m long gas chromatography column. The peak widths at half height (PWHHs) of the four compounds are relatively narrow (<6 s), and the minimum PWHH of 3.75 s is obtained for acetone. The preconcentration factors are >38 000 for benzene and toluene.

Original languageEnglish
Article number065014
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number6
DOIs
Publication statusPublished - 2012 Jun 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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