A novel hybrid process for fabricating the micro holes array

A low cost hybrid fabrication process called as 4 precision filled wax metal deposition' is developed and proposed in this study. The micro EDM hole drilling is used first to perforate micro holes through a piece of substrate ( SUS304), which is cylindrical holes in shape and has a specula surface finish. Two miniature devices including the extrusion die and the deposition mould are designed so that extrude the sacrificial material (i. e. wax) and then deposit the metal. The temperature of the extruded oily wax is determined to accurately obtain a good micro wax pillar mould and formed onto the specula SUS304 substrate, resulting in a precision cylindrical shape array. The precision metal deposition is then conducted to deposit a thick nickel metal layer onto the substrate, and the wax mould is completely removed by heated water to reveal the final product - A perforated micro holes array. The finished micro holes have an average hole diameter of 126 pm without taper and burrs, and demonstrate ideal geometric accuracy.