Fingerprint
Dive into the research topics of 'A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper
Chih Hsien Lin*, Shao Kung Hung, Mei Yung Chen, Shan Tsung Li, Li Chen Fu
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
13
Citations
(Scopus)