TY - GEN
T1 - A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper
AU - Lin, Chih Hsien
AU - Hung, Shao Kung
AU - Chen, Mei Yung
AU - Li, Shan Tsung
AU - Fu, Li Chen
PY - 2008
Y1 - 2008
N2 - This paper proposes a novel planar electromagnetic-actuated positioning stage. The stage is suspended by the monolithic parallel flexure mechanism, which motion comes from the deformation of the flexure. A linear electromagnetic actuator which consists of a near-uniform magnetic field and four coils is designed and implementation to provide the propelling force for 3-DOF motions. In order to suppress the vibration of the flexure suspension mechanism, an eddy current damper is designed and integrated with the electromagnetic actuator. The non-contact damper is more advanced than the contact damper used in our previous researches. The design traveling range is 3mm × 3mm in planar motion. The experimental results show the vibration of the flexure mechanism could be suppressed by the designed eddy current damper. The results also show the regulation and tracking performance by a well-designed robust adaptive sliding mode controller, which can overcome the disturbance and modeling uncertainty and guarantee a satisfactory performance.
AB - This paper proposes a novel planar electromagnetic-actuated positioning stage. The stage is suspended by the monolithic parallel flexure mechanism, which motion comes from the deformation of the flexure. A linear electromagnetic actuator which consists of a near-uniform magnetic field and four coils is designed and implementation to provide the propelling force for 3-DOF motions. In order to suppress the vibration of the flexure suspension mechanism, an eddy current damper is designed and integrated with the electromagnetic actuator. The non-contact damper is more advanced than the contact damper used in our previous researches. The design traveling range is 3mm × 3mm in planar motion. The experimental results show the vibration of the flexure mechanism could be suppressed by the designed eddy current damper. The results also show the regulation and tracking performance by a well-designed robust adaptive sliding mode controller, which can overcome the disturbance and modeling uncertainty and guarantee a satisfactory performance.
KW - Eddy-current damper
KW - Lorentz force actuation
KW - Parallel flexure mechanism
KW - Precision motion control
KW - Vibration suppression
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U2 - 10.1109/ICCAS.2008.4694602
DO - 10.1109/ICCAS.2008.4694602
M3 - Conference contribution
AN - SCOPUS:58149091180
SN - 9788995003893
T3 - 2008 International Conference on Control, Automation and Systems, ICCAS 2008
SP - 771
EP - 776
BT - 2008 International Conference on Control, Automation and Systems, ICCAS 2008
T2 - 2008 International Conference on Control, Automation and Systems, ICCAS 2008
Y2 - 14 October 2008 through 17 October 2008
ER -