A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper

Chih Hsien Lin, Shao Kung Hung, Mei-Yung Chen, Shan Tsung Li, Li Chen Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

This paper proposes a novel planar electromagnetic-actuated positioning stage. The stage is suspended by the monolithic parallel flexure mechanism, which motion comes from the deformation of the flexure. A linear electromagnetic actuator which consists of a near-uniform magnetic field and four coils is designed and implementation to provide the propelling force for 3-DOF motions. In order to suppress the vibration of the flexure suspension mechanism, an eddy current damper is designed and integrated with the electromagnetic actuator. The non-contact damper is more advanced than the contact damper used in our previous researches. The design traveling range is 3mm × 3mm in planar motion. The experimental results show the vibration of the flexure mechanism could be suppressed by the designed eddy current damper. The results also show the regulation and tracking performance by a well-designed robust adaptive sliding mode controller, which can overcome the disturbance and modeling uncertainty and guarantee a satisfactory performance.

Original languageEnglish
Title of host publication2008 International Conference on Control, Automation and Systems, ICCAS 2008
Pages771-776
Number of pages6
DOIs
Publication statusPublished - 2008 Dec 1
Event2008 International Conference on Control, Automation and Systems, ICCAS 2008 - Seoul, Korea, Republic of
Duration: 2008 Oct 142008 Oct 17

Publication series

Name2008 International Conference on Control, Automation and Systems, ICCAS 2008

Other

Other2008 International Conference on Control, Automation and Systems, ICCAS 2008
CountryKorea, Republic of
CitySeoul
Period08/10/1408/10/17

Fingerprint

Eddy currents
Actuators
Magnetic fields
Controllers
Uncertainty

Keywords

  • Eddy-current damper
  • Lorentz force actuation
  • Parallel flexure mechanism
  • Precision motion control
  • Vibration suppression

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Lin, C. H., Hung, S. K., Chen, M-Y., Li, S. T., & Fu, L. C. (2008). A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper. In 2008 International Conference on Control, Automation and Systems, ICCAS 2008 (pp. 771-776). [4694602] (2008 International Conference on Control, Automation and Systems, ICCAS 2008). https://doi.org/10.1109/ICCAS.2008.4694602

A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper. / Lin, Chih Hsien; Hung, Shao Kung; Chen, Mei-Yung; Li, Shan Tsung; Fu, Li Chen.

2008 International Conference on Control, Automation and Systems, ICCAS 2008. 2008. p. 771-776 4694602 (2008 International Conference on Control, Automation and Systems, ICCAS 2008).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lin, CH, Hung, SK, Chen, M-Y, Li, ST & Fu, LC 2008, A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper. in 2008 International Conference on Control, Automation and Systems, ICCAS 2008., 4694602, 2008 International Conference on Control, Automation and Systems, ICCAS 2008, pp. 771-776, 2008 International Conference on Control, Automation and Systems, ICCAS 2008, Seoul, Korea, Republic of, 08/10/14. https://doi.org/10.1109/ICCAS.2008.4694602
Lin CH, Hung SK, Chen M-Y, Li ST, Fu LC. A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper. In 2008 International Conference on Control, Automation and Systems, ICCAS 2008. 2008. p. 771-776. 4694602. (2008 International Conference on Control, Automation and Systems, ICCAS 2008). https://doi.org/10.1109/ICCAS.2008.4694602
Lin, Chih Hsien ; Hung, Shao Kung ; Chen, Mei-Yung ; Li, Shan Tsung ; Fu, Li Chen. / A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper. 2008 International Conference on Control, Automation and Systems, ICCAS 2008. 2008. pp. 771-776 (2008 International Conference on Control, Automation and Systems, ICCAS 2008).
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