A new mechanism design of electro-magnetic actuator for a micro-positioner

Mei Yung Chen, Huan Wen Tzeng, Shao Kang Hung

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

This paper proposes a new type of non-conventional electro-magnetic actuator (EMA) for micro-positioning. It is a repulsive magnetic system consisting of a motion pad and two active coils. The motion of the pad is caused by the repelling force between the coils and the permanent magnets on the pad. First, the dynamic model is derived and analyzed. Next, an adaptive sliding mode controller is developed to deal with the unknown parameters with the objective of precision positioning. The experimental results demonstrate satisfactory performances including regulation accuracy and control stiffness for the system.

Original languageEnglish
Pages (from-to)41-48
Number of pages8
JournalISA Transactions
Volume46
Issue number1
DOIs
Publication statusPublished - 2007 Feb

Keywords

  • Adaptive sliding mode control
  • Dual coil
  • Electro-magnetic actuator
  • Permanent magnet
  • Precision positioning

ASJC Scopus subject areas

  • Instrumentation
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Applied Mathematics

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