TY - JOUR
T1 - A new design of a submicropositioner utilizing electromagnetic actuators and flexure mechanism
AU - Chen, Mei Yung
AU - Huang, Hsuan Han
AU - Hung, Shao Kang
N1 - Funding Information:
Manuscript received February 13, 2009; revised September 14, 2009. First published October 6, 2009; current version published December 11, 2009. This work was supported by the National Science Council, R.O.C., under Grant NSC-95-2516-S-003-019-MY3.
PY - 2010/1
Y1 - 2010/1
N2 - In this paper, a novel XY -dimensional submicropositioner, including mechanism, control, and analysis, is successfully presented. The design of the submicropositioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and optical sensors to achieve the object of 3-DOF precise motion. From the provided experimental results, there are several main goals that have been achieved in this paper: 1) to integrate the electromagnetic actuator and the parallel flexure mechanism for planar positioning system; 2) to establish the mathematical modeling; 3) to develop an advanced adaptive slidingmode controller; and 4) to perform extensive experiments to test the realistic performance.
AB - In this paper, a novel XY -dimensional submicropositioner, including mechanism, control, and analysis, is successfully presented. The design of the submicropositioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and optical sensors to achieve the object of 3-DOF precise motion. From the provided experimental results, there are several main goals that have been achieved in this paper: 1) to integrate the electromagnetic actuator and the parallel flexure mechanism for planar positioning system; 2) to establish the mathematical modeling; 3) to develop an advanced adaptive slidingmode controller; and 4) to perform extensive experiments to test the realistic performance.
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U2 - 10.1109/TIE.2009.2033091
DO - 10.1109/TIE.2009.2033091
M3 - Article
AN - SCOPUS:72749121574
SN - 0278-0046
VL - 57
SP - 96
EP - 106
JO - IEEE Transactions on Industrial Electronics
JF - IEEE Transactions on Industrial Electronics
IS - 1
ER -