A new design of a submicropositioner utilizing electromagnetic actuators and flexure mechanism

Mei Yung Chen, Hsuan Han Huang, Shao Kang Hung

Research output: Contribution to journalArticle

50 Citations (Scopus)


In this paper, a novel XY -dimensional submicropositioner, including mechanism, control, and analysis, is successfully presented. The design of the submicropositioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and optical sensors to achieve the object of 3-DOF precise motion. From the provided experimental results, there are several main goals that have been achieved in this paper: 1) to integrate the electromagnetic actuator and the parallel flexure mechanism for planar positioning system; 2) to establish the mathematical modeling; 3) to develop an advanced adaptive slidingmode controller; and 4) to perform extensive experiments to test the realistic performance.

Original languageEnglish
Pages (from-to)96-106
Number of pages11
JournalIEEE Transactions on Industrial Electronics
Issue number1
Publication statusPublished - 2010 Jan 1


ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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