A new design of 3-DOF flexure-mechanism positioner with electromagnetic technology

Zhao Kai Wu, Mei Yung Chen, Shao Kang Hung, Sheng Chih Huang, Li Chen Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, We present the design, control and implementation of a novel, compact and three degree-offreedom (DOF) precise flexure-mechanism electromagnetic-actuating positioning system with submocrometer-scale precise positioning capability and millimeter-level large travel range. The design of the positioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and the eddy-current sensors to achieve the 3-DOF motion. The positioner presented herein shows the planar travel range of 1mm×1mm with a position resolution of ±300 nm. To let the compact system be more robust and stable in positioning, we propose an adaptive sliding-mode controller. We will demonstrate the satisfactory performance of the positioning system, including stiffness and precision, with theoretical analysis and experimental results.

Original languageEnglish
Title of host publicationProceedings of the 45th IEEE Conference on Decision and Control 2006, CDC
Pages603-608
Number of pages6
Publication statusPublished - 2006 Dec 1
Event45th IEEE Conference on Decision and Control 2006, CDC - San Diego, CA, United States
Duration: 2006 Dec 132006 Dec 15

Publication series

NameProceedings of the IEEE Conference on Decision and Control
ISSN (Print)0191-2216

Other

Other45th IEEE Conference on Decision and Control 2006, CDC
CountryUnited States
CitySan Diego, CA
Period06/12/1306/12/15

Keywords

  • Adaptive controller
  • Parallel flexure mechanism
  • Positioner
  • Precision positioning

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Modelling and Simulation
  • Control and Optimization

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  • Cite this

    Wu, Z. K., Chen, M. Y., Hung, S. K., Huang, S. C., & Fu, L. C. (2006). A new design of 3-DOF flexure-mechanism positioner with electromagnetic technology. In Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC (pp. 603-608). [4178001] (Proceedings of the IEEE Conference on Decision and Control).