A high-density, super-high-aspect-ratio microprobe array realized by high-frequency vibration assisted inverse micro w-EDM

Shun Tong Chen*, Shih Wei Yang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Fingerprint

Dive into the research topics of 'A high-density, super-high-aspect-ratio microprobe array realized by high-frequency vibration assisted inverse micro w-EDM'. Together they form a unique fingerprint.

Mathematics

Chemical Compounds

Engineering & Materials Science